{"meta":{"query_hash":"b1518a0ab8c0","filters":{"venue":"Proceedings, IEEE micro electro mechanical systems"},"cohort_total":6,"direct_labels_cover":0,"predictions_cover":6,"exported":6,"export_cap":100000,"truncated":false,"label_status":"direct model label, unvalidated","prediction_status":"machine_predicted_unvalidated (Codex and Gemma teacher distillation)","score_status":"score_only:v0-immature-baseline","snapshot":{"source":"OpenAlex, pinned release, all 482 partitions","release":"2026-06-24","frame_built":"2026-07-12"},"permalink":"https://metacan.xera.ac/q/b1518a0ab8c0","api":"https://metacan.xera.ac/api/v1/cohort?venue=Proceedings%2C+IEEE+micro+electro+mechanical+systems"},"results":[{"id":"W1970013986","doi":"10.1109/memsys.2008.4443802","title":"The nanogap pirani - a pressure sensor with superior linearity in atmospheric pressure range","year":2008,"lang":"en","type":"article","venue":"Proceedings, IEEE micro electro mechanical systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"route_ca_aff":true,"route_ca_fund":false,"route_ca_venue":false,"route_about_ca":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Linearity; Materials science; Atmospheric pressure; Pressure sensor; Pressure measurement; Constant (computer programming); Temperature measurement; Thermal; Range (aeronautics); Sensitivity (control systems); Optoelectronics; Electrical engineering; Thermodynamics; Electronic engineering; Composite material; Meteorology; Physics","score_opus":0.008821849550868576,"score_gpt":0.1921982288311977,"score_spread":0.18337637928032913,"validation_status":"score_only:v0-immature-baseline","prediction":{"id":"W1970013986","genre_codex":"empirical","genre_gemma":"empirical","domain_codex":null,"domain_gemma":null,"model_version":"codex-gemma-dda1882f352a","genre_candidate":"empirical","genre_consensus":"empirical","domain_candidate":null,"domain_consensus":null,"prediction_status":"machine_predicted_unvalidated","genre_scores_codex":[0.97965276,0.015382204,0.0012080204,0.000111925816,0.0004804347,0.0014273104,0.000012976309,0.001453632,0.00027074627],"genre_scores_gemma":[0.9948106,0.0016911614,0.0018334916,0.000019837298,0.00023461292,0.00036940785,0.0000012979746,0.0001104681,0.0009291695],"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","domain_scores_codex":[0.99768513,0.000012286345,0.00049203297,0.00050649745,0.00034188287,0.00096218585],"domain_scores_gemma":[0.9992846,0.00008152914,0.00009890312,0.0002717812,0.00015291353,0.000110220746],"candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00029078723,0.00043553562,0.0005786367,0.000031761065,0.0003258147,0.0001075739,0.00050874375,0.00037607504,0.00000401974],"category_scores_gemma":[0.00007613128,0.0002992933,0.000089103974,0.00063273235,0.000109207336,0.00024938662,0.000051211708,0.0008585469,0.000012671604],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_system_candidate":false,"about_ca_system_consensus":false,"study_design_scores_codex":[0.0001754595,0.000055870125,0.0005800821,0.0004103092,0.00015613362,0.000030368285,0.00022417646,0.00074203126,0.9953609,0.00047471255,0.0014543027,0.00033564318],"study_design_scores_gemma":[0.0022042983,0.0007203724,0.00037523705,0.00037768917,0.00013957421,0.001010705,0.00052569667,0.02426309,0.7474138,0.00015307688,0.22165225,0.0011641845],"about_ca_topic_score_codex":0.00010098478,"about_ca_topic_score_gemma":0.00003433935,"teacher_disagreement_score":0.24794708,"about_ca_system_score_codex":0.00010152528,"about_ca_system_score_gemma":0.000037403253,"threshold_uncertainty_score":0.99994594},"labels":[],"label_agreement":null},{"id":"W2100573379","doi":"10.1109/memsys.2008.4443595","title":"A hydrogel-based wireless sensor using micromachined variable inductors with folded flex-circuit structures for biomedical applications","year":2008,"lang":"en","type":"article","venue":"Proceedings, IEEE micro electro mechanical systems","topic":"Advanced Sensor and Energy Harvesting Materials","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"route_ca_aff":true,"route_ca_fund":true,"route_ca_venue":false,"route_about_ca":false,"ca_institutions":"University of British Columbia","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Inductor; Inductance; Electromagnetic coil; Optoelectronics; Capacitor; Wireless; Electrical engineering; Voltage; Computer science; Engineering","score_opus":0.021926315128814995,"score_gpt":0.2246560118311745,"score_spread":0.20272969670235952,"validation_status":"score_only:v0-immature-baseline","prediction":{"id":"W2100573379","genre_codex":"empirical","genre_gemma":"empirical","domain_codex":null,"domain_gemma":null,"model_version":"codex-gemma-dda1882f352a","genre_candidate":"empirical","genre_consensus":"empirical","domain_candidate":null,"domain_consensus":null,"prediction_status":"machine_predicted_unvalidated","genre_scores_codex":[0.67260534,0.00012553434,0.32505268,0.0000070824663,0.00034175083,0.0010131637,0.000062995096,0.000717902,0.00007355287],"genre_scores_gemma":[0.97587883,0.000010339346,0.022511667,0.00004085216,0.0007271718,0.0005007057,0.00006389341,0.0002001848,0.00006633908],"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","domain_scores_codex":[0.99738955,0.000019418454,0.00067754055,0.00064011384,0.00032161328,0.000951736],"domain_scores_gemma":[0.99893624,0.00011091331,0.00019768308,0.00022118299,0.00023365345,0.00030033628],"candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00025031337,0.000519048,0.00074133195,0.00019733002,0.00041575948,0.00011373854,0.00034956026,0.00035472625,0.0000072503735],"category_scores_gemma":[0.00004293846,0.00045747307,0.000104462226,0.0006196481,0.00009473647,0.00016368229,0.000017964245,0.0003049742,0.0000050753197],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_system_candidate":false,"about_ca_system_consensus":false,"study_design_scores_codex":[0.000080158716,0.000054231805,0.000021791082,0.00055356923,0.00012328142,0.000004369332,0.0000450119,0.005932772,0.9889318,0.0040640463,0.00013338037,0.000055601784],"study_design_scores_gemma":[0.0013365924,0.00021308067,0.0000028736367,0.00015191534,0.000109336455,0.00057973596,0.000035245994,0.06464983,0.92798483,0.00083242625,0.003409802,0.00069430884],"about_ca_topic_score_codex":0.00007641852,"about_ca_topic_score_gemma":0.0000013575641,"teacher_disagreement_score":0.30327353,"about_ca_system_score_codex":0.00031114812,"about_ca_system_score_gemma":0.000116042305,"threshold_uncertainty_score":0.9997877},"labels":[],"label_agreement":null},{"id":"W2133984867","doi":"10.1109/memsys.2008.4443799","title":"Mems capacitive force sensors for micro-scale compression testing of biomaterials","year":2008,"lang":"en","type":"article","venue":"Proceedings, IEEE micro electro mechanical systems","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":10,"is_retracted":false,"has_abstract":true,"route_ca_aff":true,"route_ca_fund":false,"route_ca_venue":false,"route_about_ca":false,"ca_institutions":"University of Toronto","funders":"","keywords":"Capacitive sensing; Microelectromechanical systems; Materials science; Compression (physics); Capacitance; Linearity; Acoustics; Mechanical engineering; Electronic engineering; Nanotechnology; Composite material; Electrical engineering; Engineering; Physics","score_opus":0.028625361144969035,"score_gpt":0.24623228759385513,"score_spread":0.2176069264488861,"validation_status":"score_only:v0-immature-baseline","prediction":{"id":"W2133984867","genre_codex":"empirical","genre_gemma":"empirical","domain_codex":null,"domain_gemma":null,"model_version":"codex-gemma-dda1882f352a","genre_candidate":"empirical","genre_consensus":"empirical","domain_candidate":null,"domain_consensus":null,"prediction_status":"machine_predicted_unvalidated","genre_scores_codex":[0.980144,0.00012514343,0.016674628,0.000044957527,0.0004727342,0.0013028014,0.00016360656,0.000112929134,0.0009591728],"genre_scores_gemma":[0.9931182,0.000006940177,0.0053499215,0.00002664247,0.00071250566,0.0002297641,0.000022444134,0.000069107824,0.00046444792],"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","domain_scores_codex":[0.9969881,0.000038844337,0.0010078318,0.00068226684,0.00037371932,0.0009092211],"domain_scores_gemma":[0.99798375,0.00039614202,0.0005232557,0.00016684715,0.00061171775,0.00031825952],"candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00052668963,0.0004219678,0.0009339391,0.00009489517,0.00033218408,0.00006809607,0.00039427535,0.0002180082,0.00003907165],"category_scores_gemma":[0.0001314083,0.00034837628,0.00028721447,0.00038510928,0.000102255995,0.00014712897,0.000079653,0.00019289537,0.000020821359],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_system_candidate":false,"about_ca_system_consensus":false,"study_design_scores_codex":[0.00015155555,0.00016902799,0.00035309393,0.00022632239,0.00008685844,9.135313e-7,0.00009328396,0.0000037312661,0.98798364,0.009881845,0.0007440922,0.00030560617],"study_design_scores_gemma":[0.0009024838,0.00045386777,0.000018359078,0.00029196276,0.00006586287,0.000031433145,0.0001878806,0.0032415115,0.9902988,0.0030197375,0.0010845008,0.00040360287],"about_ca_topic_score_codex":0.00017650377,"about_ca_topic_score_gemma":3.0615166e-7,"teacher_disagreement_score":0.012974201,"about_ca_system_score_codex":0.00007468184,"about_ca_system_score_gemma":0.00006944989,"threshold_uncertainty_score":0.9998968},"labels":[],"label_agreement":null},{"id":"W2138224023","doi":"10.1109/memsys.2008.4443797","title":"Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly","year":2008,"lang":"en","type":"article","venue":"Proceedings, IEEE micro electro mechanical systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":31,"is_retracted":false,"has_abstract":true,"route_ca_aff":true,"route_ca_fund":false,"route_ca_venue":false,"route_about_ca":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Accelerometer; Fabrication; Sensitivity (control systems); Polyimide; Thermal; Materials science; Plane (geometry); Optoelectronics; Computer science; Electronic engineering; Engineering; Composite material; Physics; Geometry; Mathematics","score_opus":0.022062757446637916,"score_gpt":0.23212722396527116,"score_spread":0.21006446651863325,"validation_status":"score_only:v0-immature-baseline","prediction":{"id":"W2138224023","genre_codex":"empirical","genre_gemma":"empirical","domain_codex":null,"domain_gemma":null,"model_version":"codex-gemma-dda1882f352a","genre_candidate":"empirical","genre_consensus":"empirical","domain_candidate":null,"domain_consensus":null,"prediction_status":"machine_predicted_unvalidated","genre_scores_codex":[0.9624747,0.001071804,0.02513379,0.00007995538,0.0005289044,0.0015226107,0.00001854573,0.008844609,0.00032509834],"genre_scores_gemma":[0.99317306,0.00023815274,0.0051865256,0.000061397914,0.00021159656,0.0007186976,0.00001187543,0.00020262858,0.00019607463],"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","domain_scores_codex":[0.99671876,0.000012893779,0.0008097027,0.00071602815,0.00034943063,0.0013931775],"domain_scores_gemma":[0.99890876,0.00012774246,0.00019389986,0.00027215772,0.00026380018,0.00023365954],"candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00037114587,0.0006129832,0.00082024635,0.00028312512,0.00032048137,0.0001187763,0.00069235585,0.00068906444,0.000005173327],"category_scores_gemma":[0.00011420685,0.00056706695,0.00022945672,0.00079824665,0.000088929315,0.00036783703,0.00005508603,0.0005596862,0.000028046486],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_system_candidate":false,"about_ca_system_consensus":false,"study_design_scores_codex":[0.000059869704,0.000058579182,0.000010672898,0.0001848251,0.00017695484,0.000007382826,0.0000826441,0.00018721567,0.9946583,0.00039854343,0.0031316173,0.0010434228],"study_design_scores_gemma":[0.00092449377,0.00043045878,0.00010261319,0.000077269025,0.000046803907,0.00019806139,0.00007032229,0.040754814,0.9553636,0.00011523969,0.001209014,0.0007073379],"about_ca_topic_score_codex":0.000029146047,"about_ca_topic_score_gemma":8.362717e-7,"teacher_disagreement_score":0.040567596,"about_ca_system_score_codex":0.00035044245,"about_ca_system_score_gemma":0.000051852076,"threshold_uncertainty_score":0.9996781},"labels":[],"label_agreement":null},{"id":"W2150204474","doi":"10.1109/memsys.2008.4443723","title":"Nanoporous device for accurate dose control in high throughput screening","year":2008,"lang":"en","type":"article","venue":"Proceedings, IEEE micro electro mechanical systems","topic":"Microfluidic and Capillary Electrophoresis Applications","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"route_ca_aff":true,"route_ca_fund":true,"route_ca_venue":false,"route_about_ca":false,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Nanoporous; Microfluidics; Materials science; Membrane; Throughput; Electrophoresis; Layer (electronics); Fluidics; Nanotechnology; Chromatography; Chemistry; Computer science","score_opus":0.017605800996191863,"score_gpt":0.22254491772088936,"score_spread":0.2049391167246975,"validation_status":"score_only:v0-immature-baseline","prediction":{"id":"W2150204474","genre_codex":"empirical","genre_gemma":"empirical","domain_codex":null,"domain_gemma":null,"model_version":"codex-gemma-dda1882f352a","genre_candidate":"empirical","genre_consensus":"empirical","domain_candidate":null,"domain_consensus":null,"prediction_status":"machine_predicted_unvalidated","genre_scores_codex":[0.854645,0.031313438,0.10928029,0.00020322594,0.0004503647,0.0029474567,0.000055878852,0.00079512026,0.00030921958],"genre_scores_gemma":[0.98927706,0.008062503,0.0005891329,0.00018522395,0.0004493282,0.0011520131,0.000023739778,0.00013254119,0.00012844072],"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","domain_scores_codex":[0.99716866,0.000023907209,0.00082686736,0.00061197253,0.00026434133,0.0011042547],"domain_scores_gemma":[0.9991184,0.0001234799,0.00014756157,0.00021116615,0.00022204951,0.00017734419],"candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0004936271,0.0004445768,0.00070868776,0.00016001934,0.00027267693,0.0000903411,0.00045991773,0.00032189387,0.000010304751],"category_scores_gemma":[0.00004434893,0.00044914865,0.0001497619,0.00062000914,0.000037150876,0.0002208142,0.000022052463,0.0004244662,0.000035576657],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_system_candidate":false,"about_ca_system_consensus":false,"study_design_scores_codex":[0.00009215373,0.0000514572,0.000063749154,0.00018556278,0.0000908935,0.0000054598336,0.000090666086,0.000081209146,0.96123266,0.0033896328,0.034541313,0.00017522671],"study_design_scores_gemma":[0.0036745237,0.00037640138,0.000105095016,0.00016090722,0.000097813754,0.0004486799,0.000119896744,0.022944488,0.90092283,0.00056632183,0.06955372,0.0010292971],"about_ca_topic_score_codex":0.00011443651,"about_ca_topic_score_gemma":0.000006112781,"teacher_disagreement_score":0.13463207,"about_ca_system_score_codex":0.00033952759,"about_ca_system_score_gemma":0.0000686485,"threshold_uncertainty_score":0.99979603},"labels":[],"label_agreement":null},{"id":"W2159877563","doi":"10.1109/memsys.2008.4443671","title":"Micro-electro-discharge machining by MEMS actuators with planar electrodes microfabricated on the work surfaces","year":2008,"lang":"en","type":"article","venue":"Proceedings, IEEE micro electro mechanical systems","topic":"Advanced Machining and Optimization Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"route_ca_aff":true,"route_ca_fund":false,"route_ca_venue":false,"route_about_ca":false,"ca_institutions":"University of British Columbia","funders":"","keywords":"Materials science; Electrode; Surface micromachining; Capacitance; Wafer; Electrical discharge machining; Microelectromechanical systems; Optoelectronics; Capacitor; Machining; Voltage; Spark gap; Electrical engineering; Composite material; Metallurgy; Fabrication; Engineering; Chemistry","score_opus":0.009618395534006964,"score_gpt":0.19551399989892643,"score_spread":0.18589560436491948,"validation_status":"score_only:v0-immature-baseline","prediction":{"id":"W2159877563","genre_codex":"empirical","genre_gemma":"empirical","domain_codex":null,"domain_gemma":null,"model_version":"codex-gemma-dda1882f352a","genre_candidate":"empirical","genre_consensus":"empirical","domain_candidate":null,"domain_consensus":null,"prediction_status":"machine_predicted_unvalidated","genre_scores_codex":[0.87612003,0.003795726,0.11244863,0.0004285147,0.0003352045,0.0016125942,0.000046693745,0.0038219527,0.0013906793],"genre_scores_gemma":[0.99515206,0.0009658172,0.0024376404,0.00022192056,0.00018988647,0.00028500648,0.00004973242,0.00025383232,0.00044411223],"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","domain_scores_codex":[0.9966068,0.00005665849,0.0006944634,0.00078811124,0.0004898664,0.0013640537],"domain_scores_gemma":[0.99879,0.00020996014,0.00028195963,0.00030552197,0.00018042694,0.00023210846],"candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005402965,0.0007733176,0.0007399488,0.00020053402,0.00067807,0.00020678868,0.000736518,0.00033071666,0.000016848559],"category_scores_gemma":[0.000066370085,0.0005580914,0.00013418045,0.0011287879,0.00009480453,0.00025473323,0.000026736076,0.0012494654,0.000039463226],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_system_candidate":false,"about_ca_system_consensus":false,"study_design_scores_codex":[0.0001858427,0.00007057013,0.00025009576,0.00006973203,0.00020344663,0.00000471246,0.0002334687,0.00052868354,0.9509835,0.0009187843,0.046330757,0.00022040606],"study_design_scores_gemma":[0.00046355848,0.0005129904,0.000007227841,0.00020393242,0.00005020126,0.00022083135,0.00008188034,0.0042012064,0.98526525,0.00011141741,0.008091251,0.000790261],"about_ca_topic_score_codex":0.000039643874,"about_ca_topic_score_gemma":0.000001113081,"teacher_disagreement_score":0.11903205,"about_ca_system_score_codex":0.0003639458,"about_ca_system_score_gemma":0.000054552962,"threshold_uncertainty_score":0.9996871},"labels":[],"label_agreement":null}]}