{"meta":{"page":1,"per_page":50,"max_per_page":100,"total":1,"total_is_capped":false,"direct_labels_cover":0,"predictions_cover":1,"direct_label_status":"direct model label, unvalidated","prediction_status":"machine_predicted_unvalidated (Codex and Gemma teacher distillation)","score_status":"score_only:v0-immature-baseline (scores rank; they never assert a category)","snapshot":{"source":"OpenAlex, pinned release, all 482 partitions","release":"2026-06-24","frame_built":"2026-07-12","author_layer_release":"2026-06-26"},"query_hash":"5ca0f9307b72","filters":{"venue":"IEEE International Symposium on Semiconductor Manufacturing conference proceedings"}},"results":[{"id":"W1997058171","doi":"10.1109/issm.2006.4493115","title":"The ROI of Metrology","year":2006,"lang":"en","type":"article","venue":"IEEE International Symposium on Semiconductor Manufacturing conference proceedings","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false},"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Metrology; Premise; Quality (philosophy); Manufacturing engineering; Value (mathematics); Computer science; Lithography; Engineering; Dimensional metrology; Systems engineering; Physics; Optics","authors":[{"name":"B Bunday","is_ca":false},{"name":"John A. Allgair","is_ca":false},{"name":"Mark Caldwell","is_ca":false},{"name":"Chas Archie","is_ca":false},{"name":"Eric Solecky","is_ca":false},{"name":"Bryan J. Rice","is_ca":false},{"name":"Bhanwar Singh","is_ca":true},{"name":"Iraj Emami","is_ca":true}],"retraction":null,"screen_n_in":null,"score":{"opus":0.01346864022112411,"gpt":0.2475620981911639,"spread":0.2340934579700397,"validation_status":"score_only:v0-immature-baseline"},"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.01349127,0.001101776,0.00120766,0.00255017,0.002989332,0.01165402,0.001905782,0.005416147,0.01247264],"category_scores_gemma":[0.02778993,0.0005591105,0.0005495847,0.001289957,0.01865689,0.01815885,0.009640406,0.008714432,0.005514316],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.005540703,"about_ca_system_score_gemma":0.005812686,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001524577,"about_ca_topic_score_gemma":0.0007731027,"domain_scores_codex":[0.9880105,0.004874873,0.0002948439,0.001514084,0.00439535,0.0009104604],"domain_scores_gemma":[0.9851923,0.007468358,0.001035154,0.00246482,0.002484515,0.00135483],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00004005832,0.00001353686,0.0003194496,0.0001611245,0.00001500688,0.00006305347,0.0005567244,0.0004103695,0.0005150789,0.9373373,0.02313208,0.03743624],"study_design_scores_gemma":[0.00001838731,0.00007632689,0.0005195215,0.0003472905,0.00001397712,0.000209824,0.0005951591,0.0009812721,0.00101899,0.5912424,0.4049464,0.00003038753],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.01182704,0.0583712,0.1087232,0.2586805,0.01034741,0.0001144872,0.0003587048,0.001452099,0.5501253],"genre_scores_gemma":[0.7235216,0.03370643,0.05442804,0.05174567,0.01577237,0.0004767924,0.0003537447,0.001911651,0.1180836],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.01349127,"threshold_uncertainty_score":0.0713495,"prediction_status":"machine_predicted_unvalidated"},"labels":[],"label_agreement":null}]}