{"meta":{"page":1,"per_page":50,"max_per_page":100,"total":1,"total_is_capped":false,"direct_labels_cover":0,"predictions_cover":1,"direct_label_status":"direct model label, unvalidated","prediction_status":"machine_predicted_unvalidated (Codex and Gemma teacher distillation)","score_status":"score_only:v0-immature-baseline (scores rank; they never assert a category)","snapshot":{"source":"OpenAlex, pinned release, all 482 partitions","release":"2026-06-24","frame_built":"2026-07-12","author_layer_release":"2026-06-26"},"query_hash":"a8d7b96e6567","filters":{"venue":"Shinku"}},"results":[{"id":"W2092836171","doi":"10.3131/jvsj.50.659","title":"Formation of High Quality Silicon Nitride Films using Microwave Excitation Plasma","year":2007,"lang":"en","type":"article","venue":"Shinku","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false},"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Materials science; Wafer; Silicon nitride; Optoelectronics; Silicon; Microwave; Plasma; Silicon on insulator; MISFET; Electrical engineering; Field-effect transistor; Transistor","authors":[{"name":"Akinobu Teramoto","is_ca":true},{"name":"Takashi Aratani","is_ca":false},{"name":"Masaaki Higuchi","is_ca":false},{"name":"Eiji Ikenaga","is_ca":false},{"name":"Masaki Hirayama","is_ca":true},{"name":"Shigetoshi Sugawa","is_ca":true},{"name":"Takeo Hattori","is_ca":false},{"name":"Tadahiro Ohmi","is_ca":false}],"retraction":null,"screen_n_in":null,"score":{"opus":0.03507368117724424,"gpt":0.2739164779139813,"spread":0.238842796736737,"validation_status":"score_only:v0-immature-baseline"},"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003145756,0.0000802057,0.0001320946,0.00006604162,0.00002161793,0.00002079935,0.00005262975,0.00006860223,0.00004514067],"category_scores_gemma":[0.00003029075,0.00008034387,0.00002908325,0.00008432132,0.00001303416,0.0002856891,0.000008904649,0.00004221516,0.00001206245],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003587212,"about_ca_system_score_gemma":0.000005833688,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002294187,"about_ca_topic_score_gemma":0.00008121125,"domain_scores_codex":[0.9993669,0.00001527416,0.0003196553,0.00006857596,0.0000990616,0.0001305435],"domain_scores_gemma":[0.9996817,0.00006827398,0.00007633192,0.0001041657,0.00004146775,0.00002813089],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001441426,0.000005330966,0.0001588499,0.0001353715,0.000007325248,5.569233e-7,0.0005035357,0.00119201,0.9969717,0.0004401585,0.00005162212,0.0005191778],"study_design_scores_gemma":[0.0002153063,0.000009597808,0.007240994,0.00002806145,0.000008616651,0.00000321743,0.0003261602,0.003422584,0.987537,0.001052482,0.00005658061,0.0000993545],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9949431,0.00009321848,0.003688021,0.000003358101,0.0004764923,0.00008122257,0.0000170165,0.00008975941,0.0006077872],"genre_scores_gemma":[0.9970379,0.00000711741,0.002815668,0.00001548286,0.00006942627,0.000001064397,0.00003489489,0.0000128941,0.000005550756],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009434603,"threshold_uncertainty_score":0.3276328,"prediction_status":"machine_predicted_unvalidated"},"labels":[],"label_agreement":null}]}