{"id":"W1155069466","doi":"10.1116/1.4923029","title":"Observation of ultraslow stress release in silicon nitride films on CaF2","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation","keywords":"Materials science; Substrate (aquarium); Silicon nitride; Stress (linguistics); Silicon; Chemical vapor deposition; X-ray photoelectron spectroscopy; Nitride; Thin film; Composite material; Atmosphere (unit); Deposition (geology); Nanotechnology; Optoelectronics; Layer (electronics); Chemical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005211915,0.0001801181,0.0001354324,0.0001444272,0.000194789,0.0001791571,0.0001600895,0.0001985432,0.001084373],"category_scores_gemma":[0.0001239885,0.000142888,0.0001013448,0.00009812522,0.0001637583,0.0001588343,0.0001256564,0.0002641565,0.0001122429],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001612394,"about_ca_system_score_gemma":0.00006886603,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000954879,"about_ca_topic_score_gemma":0.0009742801,"domain_scores_codex":[0.9999567,0.000002769864,0.000001599984,0.000008948191,0.00001661746,0.0000134626],"domain_scores_gemma":[0.9998605,0.00004362629,0.00003703893,0.00001563444,0.00002349098,0.00001959846],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003468999,0.000004429893,0.0004272376,0.00001343388,0.000003191761,0.0001034421,0.00002765023,0.00003818236,0.9989439,0.00001888197,0.00001645657,0.0003685947],"study_design_scores_gemma":[0.00001448392,0.0001468494,0.01961182,0.0000042239,0.000007334584,0.0002254458,0.00008314506,0.001291905,0.9780734,0.00001896823,0.0005163244,0.000006022272],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.999263,0.00009657977,0.0002276476,0.00001107767,0.000002710329,0.000001609183,0.00003441045,0.00001133432,0.0003515987],"genre_scores_gemma":[0.9990469,0.00008456535,0.0003519744,0.000008391369,0.000002918385,0.000004183074,0.00006784365,0.000006609201,0.0004265492],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001084373,"threshold_uncertainty_score":0.003627658,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02155213292214794,"score_gpt":0.2332495761233525,"score_spread":0.2116974432012045,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}