{"id":"W133598816","doi":"10.1007/978-1-4614-0481-1_4","title":"Setting Up a 3D TCAD Simulation","year":2011,"lang":"en","type":"book-chapter","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Crosslight Software (Canada)","funders":"","keywords":"Cadence; Software; Computer science; File format; Engineering drawing; Process (computing); Layer (electronics); Page layout; Computer graphics (images); Engineering; Operating system; Electronic engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002737344,0.0007087711,0.0009025706,0.0004624431,0.000870844,0.001305714,0.00206806,0.0015,0.02331401],"category_scores_gemma":[0.001413351,0.0008759049,0.0008715741,0.0005801578,0.0004567613,0.0009937008,0.0009828293,0.001049292,0.004328351],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001062278,"about_ca_system_score_gemma":0.001362098,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004259867,"about_ca_topic_score_gemma":0.005950251,"domain_scores_codex":[0.999714,0.00003874971,0.000009916534,0.00001904273,0.0001905268,0.00002773358],"domain_scores_gemma":[0.9996423,0.0001709231,0.00001356077,0.00006006172,0.00009495322,0.00001816277],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00005027286,0.00004438913,0.0005344882,0.0002231399,0.00005997522,0.0002144395,0.0001258374,0.9361518,0.003675221,0.03136465,0.01076901,0.01678669],"study_design_scores_gemma":[0.00003093838,0.00002713042,0.00009693065,0.00003225334,0.0000150308,0.00006061873,0.00003493369,0.9691126,0.002682408,0.01073239,0.01715461,0.00002008217],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.07076505,0.0009841252,0.6596636,0.002019699,0.001160653,0.0005549504,0.00576735,0.008634129,0.2504506],"genre_scores_gemma":[0.5081385,0.0009562269,0.4383816,0.001389839,0.000134397,0.00133907,0.003664147,0.004528382,0.04146779],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.02331401,"threshold_uncertainty_score":0.07799309,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0204956351191813,"score_gpt":0.2510755636379292,"score_spread":0.2305799285187479,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}