{"id":"W1500025436","doi":"10.1149/1.1577339","title":"Ultrathin Zirconium Silicate Films Deposited on Si(100) Using Zr(O[sup i]-Pr)[sub 2](thd)[sub 2], Si(O[sup t]-Bu)[sub 2](thd)[sub 2], and Nitric Oxide","year":2003,"lang":"en","type":"article","venue":"Journal of The Electrochemical Society","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University; National Research Council Canada; Institute for Microstructural Sciences","funders":"National Science Council; North Carolina State University","keywords":"X-ray photoelectron spectroscopy; Materials science; Analytical Chemistry (journal); Amorphous solid; Chemical state; Chemical vapor deposition; Chemical engineering; Nanotechnology; Chemistry; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009722298,0.0004037199,0.0002192022,0.0001730613,0.0001079994,0.000262527,0.0003222153,0.0002874712,0.0006361573],"category_scores_gemma":[0.0001800786,0.0004059116,0.0001825355,0.0001867704,0.0001838286,0.0001896803,0.0002003763,0.0002431019,0.0001623831],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002177513,"about_ca_system_score_gemma":0.0001254999,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007755003,"about_ca_topic_score_gemma":0.002249211,"domain_scores_codex":[0.9999136,0.000006118708,0.000006869194,0.0000215694,0.00003434312,0.00001754517],"domain_scores_gemma":[0.999904,0.00002905621,0.00002540988,0.000009498945,0.00001893575,0.00001306126],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001358499,0.000002067919,0.00007312727,0.00001454958,0.000003126806,0.00001536973,0.000003917797,0.00004518899,0.999564,0.00001298383,0.000006252578,0.000245916],"study_design_scores_gemma":[0.000006648264,0.0001028268,0.002450335,0.000003396968,0.00001730664,0.0000506216,0.00001884064,0.0005818811,0.996247,0.00001247151,0.0005050419,0.000003510961],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9964619,0.0005409991,0.001867144,0.00001625349,0.00001563366,0.00001203698,0.000154287,0.00005786531,0.0008737797],"genre_scores_gemma":[0.9887794,0.001029937,0.008264101,0.00002934596,0.000009398514,0.00001919269,0.0004168152,0.00002942105,0.001422408],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007755003,"threshold_uncertainty_score":0.002128184,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01007075840013249,"score_gpt":0.2112967932812541,"score_spread":0.2012260348811216,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}