{"id":"W1527189500","doi":"10.1109/vmic.1989.78033","title":"Simulation of density variation and step coverage for via metallization","year":2003,"lang":"en","type":"article","venue":"","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Deposition (geology); Sputtering; Materials science; Sputter deposition; Computer science; Variation (astronomy); Biological system; Computational physics; Physics; Nanotechnology; Thin film; Biology; Astrophysics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002569702,0.0003283823,0.00036315,0.000434324,0.0003705074,0.0004034266,0.0006883633,0.000600202,0.002628051],"category_scores_gemma":[0.0009353644,0.0003722988,0.000317072,0.0003857801,0.0003200556,0.0003018098,0.0002402573,0.0002622868,0.0002088194],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000936017,"about_ca_system_score_gemma":0.0007132929,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.009634522,"about_ca_topic_score_gemma":0.007202676,"domain_scores_codex":[0.9999027,0.00002388765,0.00000368713,0.00001490542,0.00003395219,0.00002080452],"domain_scores_gemma":[0.9997018,0.0001640295,0.00002812703,0.00002498001,0.00005404508,0.0000270446],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00004560985,0.00002379768,0.002050217,0.00002639902,0.00001115643,0.00009945713,0.00004430247,0.9883075,0.005193004,0.002094561,0.0003964068,0.001707555],"study_design_scores_gemma":[0.000005501665,0.0000110188,0.0002628256,0.000001119865,0.00000154084,0.00001015092,0.000005656469,0.9983626,0.0009862753,0.0001148582,0.0002359137,0.000002544479],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8985206,0.0001442756,0.08249861,0.0002487575,0.00003672486,0.00008144751,0.001350702,0.001227184,0.01589165],"genre_scores_gemma":[0.9768144,0.00008378761,0.02046205,0.00002628268,0.000004746167,0.00007055093,0.0003663605,0.0000945018,0.0020771],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009634522,"threshold_uncertainty_score":0.01915687,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01210741715546333,"score_gpt":0.2058151734997032,"score_spread":0.1937077563442398,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}