{"id":"W1531479582","doi":"10.1109/ipfa.2015.7224371","title":"Optimization and application of Electron Beam Absorbed Current technique","year":2015,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Tungsten; Scanning electron microscope; Materials science; Resistive touchscreen; Current (fluid); Optoelectronics; Electromigration; Electron; Cathode ray; Contact resistance; Beam (structure); Voltage; Nanotechnology; Optics; Electrical engineering; Physics; Composite material; Engineering; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005352726,0.0004764325,0.0003892733,0.000764998,0.0003320324,0.0009298814,0.0007281212,0.0005505075,0.002080105],"category_scores_gemma":[0.0006771161,0.0002815134,0.0003355939,0.0007369491,0.0002241418,0.000677621,0.0003208227,0.0003739544,0.000857376],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004606413,"about_ca_system_score_gemma":0.0005557781,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006275705,"about_ca_topic_score_gemma":0.00130165,"domain_scores_codex":[0.999648,0.00002410574,0.00002084873,0.00008176445,0.0001672612,0.00005793026],"domain_scores_gemma":[0.9996102,0.00006868096,0.00007177325,0.00005558168,0.0001689032,0.00002487282],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009998889,0.0001134422,0.001595202,0.0002939718,0.00002413744,0.0001438259,0.00008585625,0.004341421,0.9566348,0.001720244,0.0007063404,0.0342407],"study_design_scores_gemma":[0.00003190926,0.0005255068,0.003628834,0.00002933374,0.00006333773,0.0002646795,0.0000920868,0.01868071,0.9590594,0.000262733,0.01733247,0.00002897029],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6736405,0.01167113,0.2742318,0.0007605384,0.0003225239,0.0006328248,0.0004906935,0.001521711,0.03672823],"genre_scores_gemma":[0.8315469,0.003517339,0.1555773,0.0001128521,0.00004716362,0.0002538694,0.0003461163,0.0001885843,0.008409741],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002080105,"threshold_uncertainty_score":0.006958663,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008242698553805824,"score_gpt":0.2226225355721403,"score_spread":0.2143798370183345,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}