{"id":"W1538328146","doi":"10.1109/chicc.2015.7259701","title":"Angle tracking of MEMS hard-magnetic micromirror by PID control","year":2015,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; PID controller; Overshoot (microwave communication); Materials science; Optics; Deflection (physics); Computer science; Physics; Optoelectronics; Engineering; Mechanical engineering; Electrical engineering; Temperature control","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005782018,0.00009550638,0.0001690929,0.00004073149,0.00001045109,0.000007424977,0.0001130141,0.00007018254,0.0000577661],"category_scores_gemma":[0.00003739435,0.00008330758,0.00003135253,0.00007854643,0.00003977604,0.00008898214,0.0000134656,0.00007940803,0.00001954148],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002209477,"about_ca_system_score_gemma":0.000005381031,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001646155,"about_ca_topic_score_gemma":0.00001186065,"domain_scores_codex":[0.9995133,0.000001502521,0.0001507063,0.00009080325,0.00007330651,0.0001703616],"domain_scores_gemma":[0.9997147,0.0000222715,0.00001949836,0.0001640098,0.00003503298,0.00004453263],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004152882,0.00001239925,0.00005072087,0.00001304049,0.000009559976,0.000001262252,0.00003378137,0.0001305426,0.9802375,0.00008424665,0.009127846,0.01029496],"study_design_scores_gemma":[0.0008747904,0.000108356,0.0001574335,0.0000126291,0.00001015844,0.000003371563,0.0002355736,0.00046266,0.9536722,0.0005172356,0.04379748,0.0001481511],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9813019,0.003908591,0.00742155,0.000133281,0.000224532,0.0001699416,0.00002243173,0.000915242,0.005902512],"genre_scores_gemma":[0.99266,0.00006216609,0.006638228,0.00002718957,0.00001398248,0.0000109419,0.000002058547,0.00002083601,0.0005645273],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03466964,"threshold_uncertainty_score":0.3397184,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01753281536627697,"score_gpt":0.2195053666376682,"score_spread":0.2019725512713912,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}