{"id":"W1550585019","doi":"10.1109/icmens.2004.1509028","title":"A Tunable RF MEMS Inductor","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"","keywords":"Inductor; RFIC; Inductance; Radio frequency; Q factor; Microelectromechanical systems; Materials science; Electrical engineering; Quality (philosophy); Optoelectronics; Wafer; Engineering; Physics; Voltage; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000119913,0.00006045851,0.00006066865,0.00003446548,0.00001739945,0.000008267371,0.00005899547,0.00005147081,0.00007842878],"category_scores_gemma":[0.00000407057,0.00005029899,0.00001549569,0.00008762443,0.00001417899,0.00007621259,0.00001385123,0.0000642282,0.00005490441],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001799881,"about_ca_system_score_gemma":0.000001860649,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005431419,"about_ca_topic_score_gemma":0.00005054934,"domain_scores_codex":[0.9996952,1.309698e-7,0.00006434531,0.00006171517,0.00003836995,0.0001402398],"domain_scores_gemma":[0.9998557,0.000006316404,0.000004441505,0.0001159598,0.000006494636,0.00001111851],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[5.647318e-7,0.000008457106,0.00004586347,0.00001013586,0.000004766575,0.000004734668,0.000005358889,0.002112793,0.9583164,0.005352681,0.02919954,0.004938724],"study_design_scores_gemma":[0.0001024817,0.000008281218,0.0005934492,0.000003737448,0.000001554825,0.000002807909,0.00004076049,0.000158784,0.8568841,0.01008186,0.1320031,0.0001190156],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9088027,0.0003133945,0.002735305,0.0000475588,0.000150991,0.00004949095,0.000001125238,0.002132011,0.08576745],"genre_scores_gemma":[0.991494,0.00003337949,0.004657331,0.00001208787,0.00005781818,0.00001073557,0.000001487956,0.00001469837,0.00371846],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1028036,"threshold_uncertainty_score":0.2051133,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006233319996568476,"score_gpt":0.1865191268738041,"score_spread":0.1802858068772356,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}