{"id":"W1550585019","doi":"10.1109/icmens.2004.1509028","title":"A Tunable RF MEMS Inductor","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"","keywords":"Inductor; RFIC; Inductance; Radio frequency; Q factor; Microelectromechanical systems; Materials science; Electrical engineering; Quality (philosophy); Optoelectronics; Wafer; Engineering; Physics; Voltage; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002513888,0.0002540532,0.0002932009,0.0002338396,0.0002422354,0.000606204,0.0007858483,0.0004767428,0.002334005],"category_scores_gemma":[0.0002712754,0.0001824913,0.000309713,0.0001478294,0.0002333582,0.0006275059,0.0002941009,0.0003590441,0.001457643],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005170304,"about_ca_system_score_gemma":0.0002378252,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002578498,"about_ca_topic_score_gemma":0.0003671393,"domain_scores_codex":[0.9997458,0.00002167798,0.00001490841,0.0000810538,0.0001001425,0.00003649906],"domain_scores_gemma":[0.9997932,0.00003498255,0.00003521818,0.00003579794,0.00006419475,0.00003664787],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007614222,0.0000275231,0.0003734985,0.0001145881,0.00001717978,0.0002431537,0.00005422575,0.0009535107,0.9715632,0.002503879,0.001599526,0.02247361],"study_design_scores_gemma":[0.00007278284,0.0003738454,0.001542812,0.00002138826,0.00006059698,0.00118923,0.00003366239,0.01031253,0.9202177,0.0004252479,0.06570743,0.00004290557],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.5059019,0.007874101,0.3764102,0.002642852,0.001731217,0.0003327662,0.001061183,0.006604351,0.09744148],"genre_scores_gemma":[0.9105369,0.0009489721,0.06758444,0.0003630578,0.0002600729,0.00006490702,0.0002191276,0.0001435771,0.01987889],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.002334005,"threshold_uncertainty_score":0.00780803,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006233319996568476,"score_gpt":0.1865191268738041,"score_spread":0.1802858068772356,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}