{"id":"W1551811385","doi":"10.1016/s0151-9107(02)80017-4","title":"Effet du flux de benzène sur les propriétés des films de carbone déposés sur les aciers nitrurés en utilisant la méthode MW/ECR PACVD","year":2002,"lang":"fr","type":"article","venue":"Annales de Chimie Science des Matériaux","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"","keywords":"Materials science; Scanning electron microscope; Argon; Amorphous carbon; Analytical Chemistry (journal); Electron cyclotron resonance; Surface roughness; Amorphous solid; Carbon film; Thin film; Composite material; Plasma; Nanotechnology; Chemistry; Crystallography","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006292585,0.00047111,0.0003314015,0.0002410626,0.0005066994,0.0006442137,0.0003070822,0.0008713839,0.004010606],"category_scores_gemma":[0.0009103813,0.0002792935,0.0002188852,0.0002210972,0.0004919373,0.0005034505,0.0001734394,0.0007393517,0.0003741707],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004882512,"about_ca_system_score_gemma":0.0002187245,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00440432,"about_ca_topic_score_gemma":0.004037082,"domain_scores_codex":[0.9996013,0.00009179751,0.00001331229,0.00007188851,0.0001283413,0.00009331766],"domain_scores_gemma":[0.9987562,0.0008940261,0.00008833834,0.00004379993,0.0001420395,0.00007567192],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001424676,0.0000601307,0.0004074862,0.00007270681,0.0000197282,0.00009294529,0.00007674238,0.0005249044,0.9947736,0.0001263933,0.00007588043,0.002344895],"study_design_scores_gemma":[0.00003738834,0.0004982583,0.003948409,0.000005070294,0.00001947699,0.00002803041,0.00003432106,0.001837279,0.9929339,0.00001643719,0.0006332304,0.000008215266],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9957943,0.0009456426,0.0009505183,0.0001036687,0.00003717818,0.000006437652,0.00014966,0.00005830776,0.001954341],"genre_scores_gemma":[0.9949115,0.0007957449,0.0009362554,0.0000347766,0.00002064789,0.000009955088,0.0001493462,0.00002325336,0.00311859],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00440432,"threshold_uncertainty_score":0.01341683,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.08942276890185445,"score_gpt":0.2975939605701151,"score_spread":0.2081711916682606,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}