{"id":"W1576053245","doi":"10.1063/1.1881774","title":"A method for the analysis of multiphase bonding structures in amorphous SiOxNy films","year":2005,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":85,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"X-ray photoelectron spectroscopy; Amorphous solid; Silicon oxynitride; Materials science; Analytical Chemistry (journal); Phase (matter); Silicon; Crystallography; Chemistry; Nuclear magnetic resonance; Physics; Silicon nitride; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002328466,0.00009463344,0.0003538969,0.0001141544,0.00001956349,0.00002174123,0.0001449992,0.00003607486,0.00002938078],"category_scores_gemma":[0.000006696726,0.00006314006,0.0001532848,0.0003084295,0.00001223226,0.00006933991,0.00001056599,0.00009760084,2.988547e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002318388,"about_ca_system_score_gemma":0.00001014714,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009698147,"about_ca_topic_score_gemma":0.00001026094,"domain_scores_codex":[0.999332,0.000007375953,0.0003697113,0.00005573755,0.0001232739,0.0001118966],"domain_scores_gemma":[0.9993796,0.0002496947,0.0002013416,0.0001047254,0.00003814922,0.00002653211],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003504192,0.00001185398,0.00001585382,0.00001810467,0.0002948143,3.262999e-7,0.0004122256,0.5609954,0.4330185,0.0005541026,0.0001497961,0.004493925],"study_design_scores_gemma":[0.0008042791,0.00001906207,0.0008887728,0.00001450634,0.0007136166,0.000002170844,0.0004578536,0.4464185,0.5470803,0.002017177,0.00145761,0.000126053],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9775794,0.000272694,0.02177205,0.000009362723,0.0001228249,0.0001008679,0.00002445379,0.000009471066,0.0001089152],"genre_scores_gemma":[0.9509789,0.00001836432,0.0486954,0.00003716081,0.0002473838,0.000003986759,0.000002193454,0.00001474597,0.000001827695],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1145769,"threshold_uncertainty_score":0.2574777,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01753689985934521,"score_gpt":0.2820240219203117,"score_spread":0.2644871220609665,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}