{"id":"W1577782092","doi":"10.1002/9780470594179.ch12","title":"Photoimaging and Lithographic Processes in Polymers","year":2010,"lang":"en","type":"other","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Ottawa","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Photolithography; Photoresist; Polymer; Lithography; Resist; Extreme ultraviolet lithography; Materials science; Photochemistry; Ionic bonding; Nanotechnology; Polymer chemistry; Chemistry; Optoelectronics; Organic chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001233362,0.0004923778,0.0002300729,0.0006246304,0.0003255848,0.0008169736,0.0004934183,0.0003526522,0.01525498],"category_scores_gemma":[0.0002039278,0.0002804189,0.0002320366,0.0005382515,0.0004198924,0.001077482,0.0004634033,0.000733265,0.00780901],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005873924,"about_ca_system_score_gemma":0.0002631445,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003521051,"about_ca_topic_score_gemma":0.0006891954,"domain_scores_codex":[0.9997421,0.00001517418,0.00001020195,0.00005670833,0.0001482719,0.00002749715],"domain_scores_gemma":[0.9999303,0.00002026388,0.00001161807,0.00001698292,0.00001558472,0.000005261365],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005533075,0.00007253668,0.0002226356,0.0007402503,0.00001032721,0.0002700856,0.0001558567,0.0006430131,0.5763221,0.05551985,0.01060539,0.3553827],"study_design_scores_gemma":[0.000007033068,0.00005489547,0.0007935761,0.00007601541,0.00000903866,0.0007280043,0.00003578373,0.0008851175,0.7022417,0.003253898,0.2918989,0.0000160037],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.06241618,0.07228535,0.206456,0.001539716,0.001708924,0.0002854552,0.0009801808,0.003182109,0.6511461],"genre_scores_gemma":[0.2177901,0.05045568,0.1617081,0.0008024963,0.000339772,0.0002037908,0.0009910617,0.0007483588,0.5669607],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.01525498,"threshold_uncertainty_score":0.05103296,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003890293314945632,"score_gpt":0.22276305539356,"score_spread":0.2188727620786144,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}