{"id":"W1616312576","doi":"10.1109/ccece.2005.1557268","title":"Fuse-tethers in MEMS: theory and operation","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Fuse (electrical); Joule heating; Microelectromechanical systems; Joule effect; Fabrication; Reliability (semiconductor); Joule (programming language); Substrate (aquarium); Materials science; Process (computing); Electric heating; Mechanical engineering; Engineering; Optoelectronics; Computer science; Electrical engineering; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004570104,0.000455141,0.0005745745,0.0005418858,0.0004448027,0.0009547313,0.0007661825,0.00142428,0.001567504],"category_scores_gemma":[0.0008095028,0.0003968206,0.0004364407,0.0006871661,0.00158927,0.001835268,0.0005387135,0.00123164,0.0005304225],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006036639,"about_ca_system_score_gemma":0.0002804026,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000688482,"about_ca_topic_score_gemma":0.0005287938,"domain_scores_codex":[0.9997125,0.00005715834,0.00001278317,0.00003888585,0.0001542369,0.00002449207],"domain_scores_gemma":[0.9997962,0.000104085,0.00002911921,0.00002351157,0.00003719161,0.000009977191],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.00005565546,0.00004776936,0.0006737754,0.0004073237,0.00003242626,0.0002390954,0.0003936341,0.0979799,0.02703313,0.8003237,0.002768453,0.07004514],"study_design_scores_gemma":[0.0000145165,0.0001622793,0.0007405485,0.0001354275,0.00001784857,0.0005091813,0.0001029476,0.6684327,0.01053171,0.2851637,0.03412328,0.0000658764],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":"theoretical_or_conceptual","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.03540405,0.03966596,0.8824094,0.001566998,0.0005316622,0.00006327138,0.00009605217,0.0005860403,0.03967661],"genre_scores_gemma":[0.7762591,0.03639208,0.165838,0.000612865,0.0008742067,0.0003478125,0.0001319047,0.000195934,0.01934814],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.001567504,"threshold_uncertainty_score":0.005243838,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003124273769710036,"score_gpt":0.1914175126333341,"score_spread":0.1882932388636241,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}