{"id":"W1616616092","doi":"10.1109/pn.2015.7292463","title":"Nano-patterning of single- and bi-level surface-relief gratings using a commercial thermal scanning probe lithography system","year":2015,"lang":"en","type":"article","venue":"","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Lithography; Materials science; Fabrication; Photolithography; Thermal; Optoelectronics; Nanoimprint lithography; Optics; Layer (electronics); Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001292558,0.0002301527,0.0002850922,0.0002252666,0.0001888011,0.0002728928,0.0004029317,0.0002948981,0.001354727],"category_scores_gemma":[0.0001840897,0.0002551263,0.0001481847,0.0002049092,0.0001633673,0.0002741973,0.0002141285,0.0003019088,0.0006452758],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002419819,"about_ca_system_score_gemma":0.000198536,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006434823,"about_ca_topic_score_gemma":0.001565649,"domain_scores_codex":[0.9998294,0.000008155897,0.0000131932,0.00004112324,0.00008903162,0.00001907516],"domain_scores_gemma":[0.9998896,0.00002424602,0.0000181406,0.00002789082,0.0000272123,0.00001292056],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007258815,0.000005224545,0.00002411388,0.00002334386,0.00000128724,0.00001238924,0.00000611835,0.00006104859,0.9980745,0.0001063287,0.00009381174,0.001584507],"study_design_scores_gemma":[0.000008620295,0.00005161022,0.0008544236,0.000002213668,0.000002787615,0.0001228673,0.00000862,0.003716531,0.9932283,0.00004880983,0.001947802,0.000007357062],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9168914,0.001156329,0.06611903,0.0003275755,0.0001480182,0.0001623322,0.001103757,0.001455404,0.01263617],"genre_scores_gemma":[0.8838964,0.0004032816,0.1097549,0.0001327759,0.00002328584,0.0001639194,0.0005987898,0.0001071935,0.00491957],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001354727,"threshold_uncertainty_score":0.00453198,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.07526995490645531,"score_gpt":0.2685734159463419,"score_spread":0.1933034610398866,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}