{"id":"W1622143260","doi":"10.1063/1.1864247","title":"Copper nanopattern on SiO2 from sputter etching a Cu∕SiO2 interface","year":2005,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Etching (microfabrication); Sputtering; Materials science; Substrate (aquarium); Layer (electronics); Nanostructure; Sputter deposition; Copper; Isotropic etching; Argon; Thin film; Nanotechnology; Optoelectronics; Analytical Chemistry (journal); Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005801476,0.0001513899,0.0001416758,0.0001383928,0.0002203669,0.0001784575,0.0001825232,0.0001203619,0.0007707044],"category_scores_gemma":[0.0001361712,0.000145167,0.00012802,0.00009930952,0.0001721185,0.0001436201,0.0001245038,0.0001319041,0.0001252934],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002565528,"about_ca_system_score_gemma":0.0001147024,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001588854,"about_ca_topic_score_gemma":0.002584546,"domain_scores_codex":[0.9999481,0.000002542801,0.000002214628,0.00001257575,0.00001925329,0.00001517079],"domain_scores_gemma":[0.9999095,0.00002302508,0.00002468486,0.00001373015,0.00001549432,0.00001358742],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005523796,0.00001094679,0.001322505,0.00003206461,0.000007873177,0.0002822812,0.00006074762,0.0009849477,0.9958522,0.0002408162,0.00007527445,0.001075162],"study_design_scores_gemma":[0.00001775264,0.0001139743,0.01457201,0.000004529085,0.00001473597,0.0001999593,0.00006861132,0.02192348,0.9618138,0.0001332039,0.001128372,0.000009480464],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9980748,0.00006446648,0.0009606577,0.000007441465,0.000004990082,0.000003416712,0.00004244985,0.00004221135,0.0007995253],"genre_scores_gemma":[0.998244,0.00005215418,0.001081041,0.000005669006,0.000002536589,0.000002992632,0.00006625651,0.00001002592,0.0005354169],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001588854,"threshold_uncertainty_score":0.003159285,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006450146211114498,"score_gpt":0.2084068160348316,"score_spread":0.2019566698237171,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}