{"id":"W1632013829","doi":"10.1115/ipack2003-35199","title":"O+-Ion Implantation for Practical InP-Based Digital Optical Switches","year":2003,"lang":"en","type":"article","venue":"2003 International Electronic Packaging Technical Conference and Exhibition, Volume 1","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; National Research Council Canada","funders":"","keywords":"Ion implantation; Sheet resistance; Fabrication; Optoelectronics; Materials science; Ion; Electronic engineering; Nanotechnology; Chemistry; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002444352,0.0003272328,0.000247981,0.0001373966,0.0003507462,0.0004934072,0.0003576131,0.0003151489,0.0007732181],"category_scores_gemma":[0.0004084634,0.0002285875,0.0001207915,0.0001401257,0.0002295264,0.000367802,0.0003231628,0.000316714,0.0002388984],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002564926,"about_ca_system_score_gemma":0.0002501908,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001533738,"about_ca_topic_score_gemma":0.0007091414,"domain_scores_codex":[0.999864,0.00001683788,0.000009823972,0.00002764247,0.00005956957,0.00002216428],"domain_scores_gemma":[0.9998305,0.00004458811,0.00004944301,0.00002990132,0.00002168416,0.00002386479],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001078395,0.00001711542,0.0002325927,0.00006827435,0.000002969784,0.00005904951,0.00003879911,0.0002795148,0.9951488,0.0004317015,0.00009966911,0.00351366],"study_design_scores_gemma":[0.0000233745,0.0002673007,0.0007974783,0.00001195179,0.00001106738,0.0003164982,0.00003025846,0.001673422,0.9932075,0.0001626126,0.003492982,0.000005603998],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9813022,0.001749726,0.01287833,0.0001444085,0.0001117276,0.0000476095,0.0000632504,0.000216276,0.003486468],"genre_scores_gemma":[0.9790445,0.0009078085,0.01849567,0.00003590632,0.0000203832,0.00002266526,0.00005229533,0.00004467284,0.001375994],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007732181,"threshold_uncertainty_score":0.002586663,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01722215459192192,"score_gpt":0.2609808983906226,"score_spread":0.2437587437987006,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}