{"id":"W1635540212","doi":"10.1116/1.1752898","title":"Study of the optical properties of SiOxNy thin films by effective medium theories","year":2004,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Elastic recoil detection; Silicon oxynitride; Ellipsometry; Materials science; Silicon nitride; Thin film; Silicon; Fourier transform infrared spectroscopy; Plasma-enhanced chemical vapor deposition; Analytical Chemistry (journal); Refractive index; Nuclear reaction analysis; Spectroscopy; Hydrogen; Optics; Chemistry; Optoelectronics; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["sts"],"consensus_categories":[],"category_scores_codex":[0.0009993972,0.0002818388,0.0006572373,0.0005887357,0.0002300398,0.00003528115,0.001408854,0.000294681,0.000005513455],"category_scores_gemma":[0.0003053779,0.0001665482,0.0001070161,0.00171657,0.003230504,0.0004488127,0.0002837428,0.0008394346,7.769791e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006851933,"about_ca_system_score_gemma":0.0001388903,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001828837,"about_ca_topic_score_gemma":0.00001768742,"domain_scores_codex":[0.9978892,0.00003634863,0.0007355186,0.0002663242,0.0006593745,0.0004132671],"domain_scores_gemma":[0.9987108,0.00008556446,0.0003516678,0.0004850784,0.0002985502,0.00006833101],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005762244,0.0003142823,0.004925795,0.00007841879,0.0001189658,0.00001201394,0.003395773,0.004645763,0.9836527,0.002333392,0.00007482926,0.0003904673],"study_design_scores_gemma":[0.001079895,0.001574265,0.009837054,0.0002503534,0.0000937506,0.0001383052,0.01797195,0.0002770267,0.9639622,0.004560845,0.00003227502,0.0002220579],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9935968,0.004110956,0.0001737131,0.000932549,0.0005092187,0.0004367571,0.00001124055,0.0001682933,0.00006047929],"genre_scores_gemma":[0.9980961,0.0002418832,0.001601573,0.000008845445,0.000006754591,0.00001304693,6.140568e-8,0.00002023598,0.00001148907],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01969046,"threshold_uncertainty_score":0.9994822,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006413809076513077,"score_gpt":0.2091385053616176,"score_spread":0.2027246962851046,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}