{"id":"W1695986457","doi":"","title":"Damping and quality factor optimization in MEMS microresonators","year":2007,"lang":"en","type":"article","venue":"Canadian acoustics","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Microsystem; Microelectromechanical systems; Stiffness; Materials science; Cantilever; Damping factor; Q factor; Quality (philosophy); Loss factor; Mechanics; Structural engineering; Control theory (sociology); Engineering; Optoelectronics; Physics; Resonator; Computer science; Composite material; Nanotechnology; Electrical impedance; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006554055,0.0005755106,0.0006028926,0.0002481191,0.0004099384,0.0006057755,0.0004013806,0.0004802109,0.0008696819],"category_scores_gemma":[0.001020011,0.0003798791,0.0002193586,0.0001718179,0.0005569097,0.0005218407,0.0003815212,0.0003377883,0.0002307042],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005255648,"about_ca_system_score_gemma":0.000181841,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004535301,"about_ca_topic_score_gemma":0.0007324503,"domain_scores_codex":[0.9995205,0.00007620749,0.00002204295,0.0001172795,0.0001880645,0.0000758755],"domain_scores_gemma":[0.9994403,0.000288818,0.0001275554,0.00004248702,0.00007277963,0.0000280852],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006532396,0.00001418881,0.0002417267,0.00004010255,0.000004469428,0.00004341102,0.00007414948,0.002144131,0.9932373,0.0006070358,0.00003191959,0.003496202],"study_design_scores_gemma":[0.00004739455,0.0003244808,0.001080809,0.00001038514,0.00001408254,0.0001087949,0.00003832239,0.03080183,0.965546,0.0005160829,0.001485112,0.0000267377],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9525217,0.002202842,0.04352336,0.0001769111,0.00002514366,0.00003088783,0.00003540294,0.0002265646,0.001257258],"genre_scores_gemma":[0.9792693,0.0004386039,0.01950101,0.00001793868,0.00001184909,0.0000213688,0.00001931638,0.00004760349,0.0006728381],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008696819,"threshold_uncertainty_score":0.003813267,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0196662237049605,"score_gpt":0.2676503888847689,"score_spread":0.2479841651798084,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}