{"id":"W1695986457","doi":"","title":"Damping and quality factor optimization in MEMS microresonators","year":2007,"lang":"en","type":"article","venue":"Canadian acoustics","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Microsystem; Microelectromechanical systems; Stiffness; Materials science; Cantilever; Damping factor; Q factor; Quality (philosophy); Loss factor; Mechanics; Structural engineering; Control theory (sociology); Engineering; Optoelectronics; Physics; Resonator; Computer science; Composite material; Nanotechnology; Electrical impedance; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002028343,0.0000921395,0.0001200299,0.00009220295,0.0000592882,0.00002968792,0.0000713568,0.00006167722,0.0003027287],"category_scores_gemma":[0.00006903364,0.00009082478,0.0000228737,0.0001478146,0.00003368082,0.00004003388,0.00001743033,0.0001464797,0.000006575263],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009751363,"about_ca_system_score_gemma":0.0001174957,"about_ca_topic_candidate":true,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.02183761,"about_ca_topic_score_gemma":0.005977147,"domain_scores_codex":[0.9992044,0.00001326116,0.0002012772,0.0001579793,0.00008516755,0.0003378968],"domain_scores_gemma":[0.9992363,0.000124003,0.00003076658,0.00009227779,0.00003285607,0.0004838143],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"observational","study_design_gemma":"observational","study_design_scores_codex":[0.00003880391,0.0001324727,0.5319097,0.00007999071,0.00006216316,0.0000485518,0.0007374873,0.0051807,0.01554639,0.3030696,0.0004300028,0.1427641],"study_design_scores_gemma":[0.002092328,0.00009704087,0.8872209,0.0001352609,0.0000540458,0.000001922008,0.002420309,0.07829775,0.002885241,0.01236391,0.01280676,0.001624494],"study_design_candidate":"observational","study_design_consensus":"observational","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.827424,0.00005027923,0.1680384,0.00008954211,0.0001258985,0.0001144981,0.00008286071,0.00001024688,0.004064249],"genre_scores_gemma":[0.9971075,0.000003141708,0.002495313,0.0001756123,0.00008240822,0.000001445088,0.00001698234,0.00001026096,0.0001073403],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3553112,"threshold_uncertainty_score":0.9846761,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0196662237049605,"score_gpt":0.2676503888847689,"score_spread":0.2479841651798084,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}