{"id":"W1716351663","doi":"10.1109/mwsym.2003.1212529","title":"Low RF loss and noise of transmission lines on Si substrates using an improved ion implantation process","year":2003,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Ion implantation; Optoelectronics; Noise (video); Electric power transmission; Electrical engineering; Transmission (telecommunications); Very-large-scale integration; Silicon; Proton; Insertion loss; Ion; Physics; Computer science; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002410011,0.0004287699,0.0003547607,0.000243577,0.0001326701,0.0003496462,0.0003993966,0.0004174435,0.000760849],"category_scores_gemma":[0.0007187877,0.0002487136,0.0002182013,0.0003229235,0.0002767863,0.0003628145,0.0001961819,0.0004345696,0.000449397],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001957103,"about_ca_system_score_gemma":0.0001545345,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005596717,"about_ca_topic_score_gemma":0.000741859,"domain_scores_codex":[0.999744,0.00002986516,0.00001550954,0.00005457926,0.0001237082,0.00003239131],"domain_scores_gemma":[0.9994088,0.0001104402,0.0001358366,0.0001173585,0.0001996009,0.00002794406],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000876925,0.00001163522,0.0002838369,0.0000268279,0.000007671441,0.00006286555,0.00002769435,0.0003328097,0.9974776,0.00005332791,0.000074798,0.001553229],"study_design_scores_gemma":[0.00004276701,0.0006074762,0.005268348,0.000007148053,0.00004067118,0.0004267301,0.00002181831,0.00362291,0.9881994,0.00002672152,0.001723093,0.00001295462],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9874779,0.0005652946,0.009310719,0.00009860623,0.00003447729,0.00002312619,0.0001394113,0.0002809314,0.002069431],"genre_scores_gemma":[0.980711,0.0004836831,0.0160116,0.00003731806,0.00003363076,0.00002666666,0.000337683,0.00009664884,0.002261737],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000760849,"threshold_uncertainty_score":0.002545297,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01318363351928417,"score_gpt":0.2384000817744881,"score_spread":0.2252164482552039,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}