{"id":"W1784033252","doi":"10.1109/icecs.1998.813944","title":"A new formulation for accurate numerical extraction of interconnect capacitance in ULSI","year":2002,"lang":"en","type":"article","venue":"","topic":"Electromagnetic Simulation and Numerical Methods","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Capacitance; Interconnection; Microelectromechanical systems; Electronic engineering; Computer science; Integral equation; Coupling (piping); Charge density; Numerical analysis; Materials science; Computational science; Optoelectronics; Mathematics; Mechanical engineering; Physics; Engineering; Mathematical analysis; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006719378,0.00006870374,0.0001236236,0.00007077152,0.000008167611,0.000006021986,0.00003955081,0.00006791835,0.00050449],"category_scores_gemma":[0.0001145499,0.00006661504,0.00003913309,0.0002137066,0.000002770031,0.0001346936,0.000001646012,0.00007407433,0.00000559115],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003701527,"about_ca_system_score_gemma":0.000002234806,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001559089,"about_ca_topic_score_gemma":0.000009304633,"domain_scores_codex":[0.999501,0.00001594346,0.0002222537,0.00008129339,0.00005494832,0.0001245085],"domain_scores_gemma":[0.999585,0.0002588429,0.0000252521,0.00007190229,0.0000217498,0.00003729263],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00006806876,0.00007092591,0.0005684136,0.00008955592,0.00002419534,7.855614e-7,0.0007280931,0.05817012,0.2847539,0.009109625,0.002790538,0.6436257],"study_design_scores_gemma":[0.0004983579,0.0001202398,0.001570367,0.00001169247,0.000004060621,0.000002115327,0.00001835775,0.9636318,0.03074795,0.001925033,0.001375886,0.00009412584],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.06742749,0.0001310865,0.9279739,0.0001068801,0.0001222496,0.0001657122,8.273345e-7,0.00008283958,0.003989],"genre_scores_gemma":[0.9138288,0.00001525179,0.08579449,0.00002640076,0.00002946011,0.00001085654,0.00000138747,0.00001085928,0.0002824652],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.9054617,"threshold_uncertainty_score":0.5523812,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0340330339237548,"score_gpt":0.2974342105426647,"score_spread":0.2634011766189099,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}