{"id":"W1825243484","doi":"10.1116/1.4934762","title":"Spatially resolved electron density and electron energy distribution function in Ar magnetron plasmas used for sputter-deposition of ZnO-based thin films","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"ZnO doping and properties","field":"Materials Science","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation","keywords":"Langmuir probe; Sputter deposition; Cavity magnetron; Atomic physics; Plasma; Electron; Sputtering; Materials science; Range (aeronautics); Thin film; Electron temperature; Deposition (geology); Electron density; High-power impulse magnetron sputtering; Plasma diagnostics; Physics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002047803,0.0002041903,0.0004396922,0.0005263741,0.000236071,0.0001002682,0.0003187582,0.0002420112,0.000005956458],"category_scores_gemma":[0.0001710347,0.0001619282,0.00005408074,0.0006890078,0.0006061912,0.0005558246,0.00007987831,0.0002582492,7.186332e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001132632,"about_ca_system_score_gemma":0.00039082,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001508823,"about_ca_topic_score_gemma":0.0001601987,"domain_scores_codex":[0.9980307,0.00009055875,0.0005978116,0.0003706857,0.0004270744,0.0004831294],"domain_scores_gemma":[0.9986104,0.00008591119,0.0005742583,0.0001978241,0.0004142603,0.0001172873],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0009084164,0.00009164325,0.007453661,0.00003391529,0.000007279515,0.000004654032,0.0001374712,0.002204619,0.9880845,0.0007029637,0.0001203559,0.000250512],"study_design_scores_gemma":[0.001515786,0.004450422,0.004696704,0.0001201249,0.00004543953,0.0000759521,0.0002428698,0.03701709,0.9492,0.002248546,0.0001872549,0.000199803],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9862954,0.00120796,0.01088173,0.001084857,0.0002963997,0.0001668307,0.00001681969,0.00004254003,0.000007437354],"genre_scores_gemma":[0.9951493,0.0001013072,0.004633443,0.00004278266,0.0000239906,0.00000832852,0.000007664639,0.0000105917,0.00002261709],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0388845,"threshold_uncertainty_score":0.660324,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01331819763851075,"score_gpt":0.2385126092221793,"score_spread":0.2251944115836685,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}