{"id":"W1831310242","doi":"10.1109/vlsit.1994.324397","title":"Novel deep sub-quarter micron PMOSFETs with ultra-shallow junctions utilizing boron diffusion from poly-Si/oxide(BDSOX)","year":2002,"lang":"en","type":"article","venue":"","topic":"Advancements in Semiconductor Devices and Circuit Design","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Boron; Materials science; Fabrication; Silicon; Optoelectronics; Diffusion; CMOS; Oxide; Quarter (Canadian coin); Nanotechnology; Chemistry; Metallurgy; Physics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00004473039,0.0003669402,0.0002767402,0.00008513984,0.0001525922,0.00007964599,0.000223995,0.0001406953,0.001538084],"category_scores_gemma":[0.000004846197,0.0003203039,0.00008020698,0.0001989262,0.00004419381,0.0004406122,0.0000150892,0.0002640617,0.0002155309],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001387852,"about_ca_system_score_gemma":0.00000511756,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001859619,"about_ca_topic_score_gemma":0.0004794516,"domain_scores_codex":[0.9984283,0.00001446319,0.0003400199,0.0004380493,0.0002730199,0.0005060762],"domain_scores_gemma":[0.9992235,0.00005725067,0.00005679802,0.0004708088,0.00004013191,0.0001515459],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001017092,0.0001416924,0.002540172,0.00002701981,0.000112862,0.00001018204,0.0005010324,0.0008147488,0.9809206,0.0001178492,0.001250442,0.0135532],"study_design_scores_gemma":[0.01124351,0.0007301276,0.03479879,0.0008842419,0.0007594475,0.0002750629,0.01218279,0.2242713,0.6078234,0.0006207702,0.100324,0.006086494],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6822811,0.002606189,0.2853604,0.00005197213,0.000834882,0.00033903,0.00003993144,0.0007295727,0.02775691],"genre_scores_gemma":[0.9949454,0.0002995958,0.003363429,0.0002545608,0.0001565697,0.0000315798,0.00004485803,0.00009375846,0.0008102269],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3730972,"threshold_uncertainty_score":0.9999249,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01724948642418848,"score_gpt":0.195217016221112,"score_spread":0.1779675297969235,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}