{"id":"W1837244333","doi":"10.1139/cjp-2013-0604","title":"Monitoring of powder formation via optical emission spectroscopy and self-bias-voltage measurements for high depletion μc-Si:H deposition regimes","year":2014,"lang":"en","type":"article","venue":"Canadian Journal of Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Biasing; Silane; Deposition (geology); Hydrogen; Silicon; Plasma; Solar cell; Chemical vapor deposition; Analytical Chemistry (journal); Crystalline silicon; Optoelectronics; Physics; Materials science; Voltage; Composite material; Chemistry","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002859756,0.0003361253,0.0002311132,0.000512232,0.0002997569,0.000327578,0.0007019012,0.0006378052,0.001765335],"category_scores_gemma":[0.0005653465,0.0002309665,0.0002345282,0.0004387192,0.0002730961,0.0004278847,0.0002201271,0.0008028965,0.000303385],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004676752,"about_ca_system_score_gemma":0.0002241112,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009899677,"about_ca_topic_score_gemma":0.001759508,"domain_scores_codex":[0.9996573,0.0000263839,0.00002175756,0.00009552887,0.0001515974,0.00004737237],"domain_scores_gemma":[0.9995776,0.000178876,0.00007577909,0.00004570136,0.0001061503,0.00001594143],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007786493,0.00003694211,0.0007575611,0.00005480301,0.000005675775,0.00004475567,0.00005929694,0.0001079373,0.9949302,0.0001024376,0.0000798871,0.003742513],"study_design_scores_gemma":[0.000003879425,0.00008052008,0.003118051,0.000003537835,0.000004661111,0.00005992641,0.00002977175,0.001925246,0.9943653,0.00003193391,0.0003727353,0.000004457689],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9718166,0.000656099,0.02348909,0.0001172686,0.00004369851,0.00007245008,0.0007864611,0.0004698252,0.002548535],"genre_scores_gemma":[0.9817456,0.0004260175,0.01634261,0.00005536361,0.00001300447,0.00009820976,0.0003105681,0.00004494072,0.0009638008],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001765335,"threshold_uncertainty_score":0.005905628,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01655011009598586,"score_gpt":0.2086338749708483,"score_spread":0.1920837648748624,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}