{"id":"W1879288613","doi":"10.1109/drc.2005.1553082","title":"Application of carbon nanotubes in nano-lithography and nano-electronics","year":2005,"lang":"en","type":"article","venue":"","topic":"Carbon Nanotubes in Composites","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Acadia University","funders":"","keywords":"Carbon nanotube; Materials science; Electron-beam lithography; Nanotechnology; Nano-; Lithography; Nanolithography; Stencil lithography; Silicon; Evaporation; Fabrication; Electron beam physical vapor deposition; Nanoelectronics; Optoelectronics; Chemical vapor deposition; Resist; Layer (electronics); Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001831808,0.0002756818,0.0001858412,0.0004049388,0.0002840507,0.0003362954,0.0002552764,0.0005567091,0.001394371],"category_scores_gemma":[0.0002520692,0.0001534247,0.0001694497,0.0002870423,0.0004196037,0.0004501332,0.0004376036,0.0003524317,0.0006427339],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002839518,"about_ca_system_score_gemma":0.0002124423,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001730004,"about_ca_topic_score_gemma":0.0003481086,"domain_scores_codex":[0.9998248,0.00002832825,0.000009668823,0.00002925504,0.0000884773,0.00001950026],"domain_scores_gemma":[0.9998522,0.00006892694,0.00001536817,0.00002231575,0.00002621296,0.00001497976],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008065713,0.00004816019,0.0006715414,0.0006556594,0.00002208703,0.0005633179,0.00009335294,0.002100568,0.8737634,0.02803759,0.001297088,0.09266665],"study_design_scores_gemma":[0.00001193656,0.0001494456,0.0008753228,0.00005560281,0.0000153185,0.001278942,0.00002983624,0.005363739,0.8939779,0.007994295,0.09022175,0.00002587214],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.275668,0.1679426,0.4846362,0.003165092,0.002550513,0.0003323574,0.0003441975,0.00110195,0.06425912],"genre_scores_gemma":[0.6893086,0.05261714,0.2415484,0.0006417575,0.0003913258,0.0001469469,0.0001873636,0.00008224929,0.01507634],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.001394371,"threshold_uncertainty_score":0.0046646,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005194723863051373,"score_gpt":0.230722337610189,"score_spread":0.2255276137471376,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}