{"id":"W1881469964","doi":"10.1002/sia.4849","title":"Depth profiling of NbxO/W multilayers: effect of primary ion beam species (O2 + , Ar + and Cs + )","year":2012,"lang":"en","type":"article","venue":"Surface and Interface Analysis","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"University of Alberta","keywords":"Sputtering; Argon; Ion; Atomic physics; Chemistry; Ion beam; Vacancy defect; Analytical Chemistry (journal); Oxygen; Materials science; Thin film; Physics; Crystallography; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.001138107,0.0008825322,0.002080672,0.0009741694,0.0002348673,0.0001489454,0.0004042199,0.0003785795,0.0004056905],"category_scores_gemma":[0.0001655959,0.00078178,0.0008946843,0.001928758,0.0003038594,0.00143706,0.0002530334,0.0006585252,0.00005155979],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002186473,"about_ca_system_score_gemma":0.00003875459,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000507707,"about_ca_topic_score_gemma":0.00004532139,"domain_scores_codex":[0.9959249,0.0002893941,0.001378187,0.0007795879,0.0006677971,0.000960082],"domain_scores_gemma":[0.997476,0.0005872294,0.0003769849,0.0008978155,0.0003054357,0.0003565754],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001560706,0.0001639609,0.1191692,0.0006996329,0.003621304,0.000003315222,0.003073939,0.8287077,0.0421632,0.00001411912,0.0004000789,0.001827513],"study_design_scores_gemma":[0.001129066,0.0003671407,0.003387171,0.0003574074,0.004873942,0.00001325657,0.006395247,0.6798603,0.3005157,0.000007084788,0.002162223,0.0009314734],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9863221,0.007002231,0.004035225,0.00007364053,0.00009113012,0.0004490522,0.0001393847,0.0001797139,0.001707525],"genre_scores_gemma":[0.9940475,0.002453609,0.002232309,0.00002915932,0.0001426616,0.00002260126,0.0001236732,0.0001086671,0.0008398134],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2583525,"threshold_uncertainty_score":0.9994633,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01039644649783138,"score_gpt":0.2383819412324196,"score_spread":0.2279854947345883,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}