{"id":"W1883563335","doi":"10.1109/iciprm.1998.712435","title":"InP in HBTs by vertical and lateral wet etching","year":2002,"lang":"en","type":"article","venue":"","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Common emitter; Materials science; Heterojunction; Etching (microfabrication); Optoelectronics; Heterojunction bipolar transistor; Dry etching; Gallium arsenide; Bipolar junction transistor; Isotropic etching; Transistor; Electrical engineering; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007757227,0.0002042421,0.0001235148,0.00006728445,0.0001372121,0.0002617016,0.0002126309,0.000160576,0.0008168214],"category_scores_gemma":[0.0001430567,0.0001942932,0.00012426,0.0001000611,0.0001215105,0.0002413961,0.0002231341,0.0001614887,0.0002112987],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001241418,"about_ca_system_score_gemma":0.00009271383,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000394036,"about_ca_topic_score_gemma":0.000880587,"domain_scores_codex":[0.999925,0.000007250785,0.000003470011,0.00001472122,0.00003275544,0.00001681944],"domain_scores_gemma":[0.999943,0.00001558594,0.00001878162,0.000007417756,0.00001102639,0.000004009089],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002171314,0.000005414537,0.0001972163,0.00005185347,0.000004487795,0.0000364536,0.0000199957,0.0002358519,0.9951716,0.0001624527,0.00005594333,0.004036886],"study_design_scores_gemma":[0.000008351688,0.0001353646,0.001678573,0.000006521475,0.00002188496,0.0003473964,0.00002350642,0.003047256,0.9910932,0.00009089864,0.003542827,0.000004159851],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.97495,0.002344682,0.01604207,0.00006190123,0.00004729906,0.00003037895,0.0001408517,0.0001424502,0.006240366],"genre_scores_gemma":[0.9823518,0.001190742,0.01256161,0.00003264978,0.00001738414,0.00002549566,0.0001697348,0.00004255626,0.00360798],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008168214,"threshold_uncertainty_score":0.002732515,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007404256847276542,"score_gpt":0.190031448484206,"score_spread":0.1826271916369294,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}