{"id":"W188800282","doi":"10.1109/mnrc15848.2009.5338970","title":"Micro thermal actuator with integrated capacitive position sensor","year":2009,"lang":"en","type":"article","venue":"","topic":"Advanced Sensor Technologies Research","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Queen's University; CMC Microsystems (Canada)","funders":"","keywords":"Actuator; Capacitive sensing; Microelectromechanical systems; Position sensor; Finite element method; Displacement (psychology); Position (finance); Thermal; Engineering; Electronic engineering; Mechanical engineering; Materials science; Control theory (sociology); Computer science; Electrical engineering; Optoelectronics; Structural engineering; Physics; Control (management)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001916399,0.0004946428,0.0004368738,0.0003192523,0.0002464083,0.0004090082,0.001275465,0.000628977,0.001529662],"category_scores_gemma":[0.0004692743,0.0003605842,0.0002729547,0.0002117289,0.0002415635,0.0006179364,0.0004004885,0.0006391722,0.0005361384],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004566039,"about_ca_system_score_gemma":0.0004184068,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004192861,"about_ca_topic_score_gemma":0.001095447,"domain_scores_codex":[0.9993265,0.00003320879,0.00002794669,0.000167835,0.0004039998,0.00004050053],"domain_scores_gemma":[0.9997167,0.00006185847,0.00006007536,0.00002787052,0.0001088624,0.00002472137],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001042108,0.0000497002,0.0003447878,0.0002795731,0.00002055974,0.000149368,0.00004694064,0.002022203,0.9541699,0.00156588,0.0008773649,0.04036957],"study_design_scores_gemma":[0.00004824471,0.0005688941,0.002204448,0.00003142537,0.00007739739,0.001592622,0.00002077652,0.03940287,0.935276,0.0002740298,0.02042945,0.00007384676],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1747448,0.00607625,0.7956311,0.0005548064,0.0008849707,0.0003458637,0.0003708073,0.002554696,0.01883667],"genre_scores_gemma":[0.5702879,0.00118539,0.415376,0.0002533775,0.0002467058,0.0001815658,0.0001560994,0.00006703989,0.01224588],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001529662,"threshold_uncertainty_score":0.005117238,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007803615199598894,"score_gpt":0.2252190368691008,"score_spread":0.2174154216695019,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}