{"id":"W1888369181","doi":"10.1139/cjp-2013-0612","title":"Fabrication of high gauge factor piezoresistive nanocrystalline Si film using aluminum-induced crystallization of HWCVD deposited a-Si:H","year":2014,"lang":"en","type":"article","venue":"Canadian Journal of Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Council of Scientific and Industrial Research, India","keywords":"Gauge factor; Piezoresistive effect; Annealing (glass); Crystallization; Nanocrystalline material; Fabrication; Aluminium; Thin film; Optoelectronics; Physics; Composite material; Materials science; Nanotechnology","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001089911,0.0002095026,0.000252099,0.0001360213,0.0002029695,0.0002077297,0.0003264725,0.0001822924,0.0007280133],"category_scores_gemma":[0.0001687246,0.0001844345,0.0001379242,0.0002003658,0.0001718258,0.0001774408,0.0001475686,0.0003085495,0.0002236107],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004607291,"about_ca_system_score_gemma":0.0003914086,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003366374,"about_ca_topic_score_gemma":0.009189968,"domain_scores_codex":[0.9999201,0.000002666077,0.000006105289,0.00002440833,0.00003459386,0.00001216486],"domain_scores_gemma":[0.9998699,0.00002562193,0.00003010548,0.00002447717,0.0000350749,0.00001477674],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005289031,0.000002688879,0.00004709093,0.0000107894,0.000001306174,0.00002143175,0.000008624572,0.00003828359,0.9995407,0.0000313177,0.00001876566,0.0002738003],"study_design_scores_gemma":[0.000004872543,0.00003393261,0.0009216359,0.000001635965,0.000003165766,0.00004129534,0.000009677742,0.001005412,0.9974922,0.000007948388,0.000475794,0.000002385215],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9918792,0.0002197715,0.005257656,0.00004902109,0.00002830586,0.00005087174,0.0004172976,0.0001436744,0.001954132],"genre_scores_gemma":[0.9805887,0.0002713812,0.01703535,0.00001391495,0.000008344156,0.00005577738,0.0002650838,0.00003204975,0.001729509],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003366374,"threshold_uncertainty_score":0.006693602,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01540099653957759,"score_gpt":0.1996748881553927,"score_spread":0.1842738916158151,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}