{"id":"W1897132364","doi":"10.1109/icmens.2003.1221974","title":"RF MEMS devices","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":28,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Variable capacitor; Capacitor; Inductor; Electrical engineering; Electronic engineering; Radio frequency; Materials science; Engineering; Optoelectronics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003056201,0.0008337621,0.0005526869,0.0008356192,0.0006121018,0.001215002,0.001354008,0.001409527,0.03490296],"category_scores_gemma":[0.0005668346,0.0003058547,0.000353093,0.0006861606,0.0004116571,0.001154468,0.001050016,0.0009131338,0.02801389],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004563611,"about_ca_system_score_gemma":0.000161953,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001563603,"about_ca_topic_score_gemma":0.0003125929,"domain_scores_codex":[0.9994492,0.00003962929,0.00002595853,0.0001131712,0.0003086937,0.00006328683],"domain_scores_gemma":[0.9998098,0.00003782131,0.00003052267,0.00004635856,0.00006055593,0.00001495433],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001400337,0.0001274446,0.0007637114,0.001858372,0.00008188167,0.001037312,0.0002538784,0.0005634843,0.4123808,0.08215869,0.1384985,0.3621359],"study_design_scores_gemma":[0.00002115694,0.0001468623,0.0006095886,0.0001298838,0.0000323965,0.001704318,0.00005387928,0.0007516485,0.08845954,0.002978404,0.9050886,0.00002382982],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.03293555,0.1153404,0.09100436,0.005484643,0.009405771,0.0005949493,0.003096439,0.005058936,0.737079],"genre_scores_gemma":[0.2843923,0.05775744,0.08269412,0.00659919,0.003613523,0.0007323694,0.002937034,0.0005154818,0.5607585],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.03490296,"threshold_uncertainty_score":0.116762,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008817871191516665,"score_gpt":0.2161731319817642,"score_spread":0.2073552607902475,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}