{"id":"W1897132364","doi":"10.1109/icmens.2003.1221974","title":"RF MEMS devices","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":28,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Variable capacitor; Capacitor; Inductor; Electrical engineering; Electronic engineering; Radio frequency; Materials science; Engineering; Optoelectronics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000008823397,0.0000459657,0.0000437513,0.00002207797,0.00001397381,0.00000546889,0.00005748547,0.00003312138,0.00002921165],"category_scores_gemma":[0.000003756595,0.00003702956,0.0000122555,0.00005855399,0.00001158,0.00006910277,0.00001071499,0.00004519209,0.00008216871],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001650423,"about_ca_system_score_gemma":0.000001760636,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009100603,"about_ca_topic_score_gemma":0.0000585748,"domain_scores_codex":[0.9997876,4.008614e-8,0.00004355729,0.00004565614,0.00002914341,0.00009397562],"domain_scores_gemma":[0.9998894,0.000003797172,0.00000299287,0.00008645532,0.000004085634,0.00001328666],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[9.742265e-7,0.00001361892,0.00009210298,0.00003358643,0.00002233495,0.00001320076,0.00006322734,0.03575996,0.9021174,0.01750841,0.001078951,0.04329627],"study_design_scores_gemma":[0.0001464486,0.00001281016,0.0005517664,0.000009421588,0.0000017439,0.000003736869,0.0001134041,0.00002900184,0.9281799,0.01441333,0.05642283,0.0001156302],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9309946,0.0004731778,0.01294049,0.0001380058,0.0001421207,0.00003925172,4.979098e-7,0.002503243,0.05276857],"genre_scores_gemma":[0.9925346,0.0001076384,0.007106479,0.00003508124,0.00001785778,0.000004723392,3.694199e-7,0.000008525491,0.0001846651],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06154001,"threshold_uncertainty_score":0.1510021,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008817871191516665,"score_gpt":0.2161731319817642,"score_spread":0.2073552607902475,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}