{"id":"W1928345216","doi":"","title":"Modelling and verification of XeF2 silicon micromachining","year":2009,"lang":"en","type":"article","venue":"International Journal of Nanomanufacturing","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Xenon difluoride; Etching (microfabrication); Materials science; Silicon; Surface micromachining; Bulk micromachining; Microelectromechanical systems; Chamber pressure; Isotropy; Composite material; Optoelectronics; Optics; Fabrication; Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002678043,0.0004251566,0.0004000083,0.0001526169,0.0002372124,0.0004609696,0.0008903311,0.0007214287,0.002389918],"category_scores_gemma":[0.0005727322,0.0002482429,0.000388476,0.0001601556,0.0002951084,0.0003959581,0.0003329133,0.0002714526,0.0004346674],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005143564,"about_ca_system_score_gemma":0.0009083612,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.006539879,"about_ca_topic_score_gemma":0.003194863,"domain_scores_codex":[0.9997154,0.00002394406,0.00001158473,0.00005157029,0.0001579296,0.00003956709],"domain_scores_gemma":[0.9998378,0.00005327465,0.0000223568,0.00003764597,0.00004175916,0.000007187305],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00006577509,0.00002368289,0.0008707921,0.0001494478,0.00001297844,0.0002525329,0.00009247429,0.9185299,0.06559604,0.004683399,0.000283491,0.009439428],"study_design_scores_gemma":[0.00001257175,0.00004581924,0.0005601853,0.000005736488,0.000004040452,0.00006278411,0.00001311666,0.9710497,0.02589772,0.0003012605,0.002038195,0.000008868094],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4045802,0.000546487,0.5687091,0.0001736486,0.0001095259,0.000197658,0.0009589189,0.001779605,0.02294488],"genre_scores_gemma":[0.934131,0.0003118495,0.0588578,0.00001763921,0.000008099835,0.000135491,0.0002917735,0.000076219,0.006170069],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.006539879,"threshold_uncertainty_score":0.01300365,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009975036321014732,"score_gpt":0.2302547757962929,"score_spread":0.2202797394752782,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}