{"id":"W1929086462","doi":"10.1139/cjp-2013-0636","title":"Investigation of porosity and atmospheric gas diffusion in microcrystalline silicon fabricated at high growth rates","year":2013,"lang":"en","type":"article","venue":"Canadian Journal of Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"European Commission","keywords":"Microcrystalline; Raman spectroscopy; Silicon; Analytical Chemistry (journal); Microcrystalline silicon; Deposition (geology); Porosity; Oxygen; Porous silicon; Fourier transform infrared spectroscopy; Diffusion; Intensity (physics); Microstructure; Materials science; Optics; Crystalline silicon; Composite material; Physics; Chemistry; Crystallography; Environmental chemistry; Optoelectronics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004633812,0.0001016746,0.0001967138,0.00004166208,0.00002835345,0.00001453887,0.0001140576,0.00007130032,0.00001381018],"category_scores_gemma":[0.00002226026,0.0001011347,0.00002866903,0.0002412937,0.0001075767,0.0001872562,0.000007987286,0.0001677828,0.000001758442],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002206522,"about_ca_system_score_gemma":0.00006624155,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.006511969,"about_ca_topic_score_gemma":0.00696421,"domain_scores_codex":[0.9994541,0.0000140196,0.0002492886,0.00006440151,0.00006439911,0.0001537273],"domain_scores_gemma":[0.9995523,0.0000231024,0.00009471883,0.00008214841,0.00009885156,0.00014885],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003051224,0.000004624544,0.07351233,0.0000782171,0.00001888967,0.00001056097,0.0005781415,0.001470728,0.9219005,0.0001579903,0.0006695865,0.001595394],"study_design_scores_gemma":[0.0007098463,0.00008993147,0.4337932,0.0001694563,0.00002902307,0.00002502675,0.0001880876,0.004803556,0.5506036,0.009253847,0.00008217238,0.0002522249],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.998705,0.0005549469,0.0003130636,0.0002423469,0.00007030591,0.00007440411,0.000008079957,0.00002036742,0.00001151965],"genre_scores_gemma":[0.9985992,0.00007871545,0.0012518,0.00001871804,0.00002117133,0.000001237544,0.000004297844,0.00001608145,0.000008804379],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3712969,"threshold_uncertainty_score":0.9844193,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006425393134257866,"score_gpt":0.1557478047470982,"score_spread":0.1493224116128403,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}