{"id":"W1954039074","doi":"10.1007/s10470-006-9020-x","title":"System integration of high voltage electrostatic MEMS actuators","year":2007,"lang":"en","type":"article","venue":"Analog Integrated Circuits and Signal Processing","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal; Dalsa Corporation","funders":"","keywords":"Microelectromechanical systems; Actuator; Voltage; Electrical engineering; CMOS; Engineering; Microcontroller; Capacitive sensing; Electronic engineering; Interface (matter); Materials science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000204284,0.0002462723,0.0002515242,0.0002095248,0.0003744981,0.0006141321,0.000743967,0.0004284549,0.004258868],"category_scores_gemma":[0.0003029881,0.0002106449,0.0001995827,0.0002178851,0.0001304531,0.0006705748,0.000487305,0.0002546301,0.0007913249],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003803573,"about_ca_system_score_gemma":0.00031453,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005357596,"about_ca_topic_score_gemma":0.00154717,"domain_scores_codex":[0.9997206,0.00001781018,0.00001318096,0.00006293719,0.0001453906,0.00003992036],"domain_scores_gemma":[0.9998746,0.00002366423,0.00001652918,0.0000203801,0.00005244413,0.0000122759],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002255778,0.00007126934,0.0007604535,0.0001299802,0.00004292698,0.0001490439,0.0001265075,0.001496844,0.9570459,0.002546025,0.001124711,0.03628077],"study_design_scores_gemma":[0.00005246678,0.0006545892,0.006325203,0.00002202534,0.00006984635,0.0004071398,0.00005812653,0.04940237,0.9161767,0.0007270803,0.02607333,0.00003108862],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8185464,0.001814741,0.1450637,0.0005159723,0.0007264076,0.0001752287,0.0004812928,0.002455744,0.03022055],"genre_scores_gemma":[0.9607388,0.0002479646,0.02733239,0.0001006041,0.00007554326,0.00006082844,0.0002483923,0.00006063799,0.0111349],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004258868,"threshold_uncertainty_score":0.01424736,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008660769450574403,"score_gpt":0.219807436244822,"score_spread":0.2111466667942476,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}