{"id":"W1954512750","doi":"10.1109/leos.1993.379416","title":"Vacuum ultraviolet laser ablation of insulators and III-V semiconductors","year":2002,"lang":"en","type":"article","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Opacity; Ultraviolet; Laser; Excimer laser; Materials science; Optoelectronics; Polymer; Semiconductor; Optics; Vacuum ultraviolet; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003998504,0.00007693147,0.00009657361,0.00005076253,0.00001355702,0.00001564026,0.00004635871,0.00005908822,0.0002504468],"category_scores_gemma":[0.000005031771,0.00006854921,0.00001087639,0.00007208814,0.00002293568,0.0001548504,0.00001130594,0.00003970278,0.000005290034],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000133423,"about_ca_system_score_gemma":0.00000119758,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001774612,"about_ca_topic_score_gemma":0.000001271293,"domain_scores_codex":[0.9996449,0.000004950176,0.0001383801,0.00007364493,0.00005477434,0.00008336183],"domain_scores_gemma":[0.9998343,0.000009538395,0.00001803277,0.00009363682,0.00001688807,0.00002761021],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003483268,0.00002739114,0.003613252,0.0002357586,0.00002833581,0.000001435628,0.0006920673,0.0004052326,0.9877404,0.00064503,0.00373557,0.002872027],"study_design_scores_gemma":[0.000144543,0.0000148278,0.001691624,0.00002764399,0.000007343679,0.000002719889,0.00001703078,0.007753022,0.9889446,0.0009570071,0.0003210071,0.0001186072],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9954544,0.00006606544,0.0003889445,0.00001169142,0.00007890657,0.0000535613,0.000004849417,0.0004860602,0.003455461],"genre_scores_gemma":[0.9984127,0.00005016853,0.001335839,0.00001524019,0.00002125666,0.000002652556,0.000002051723,0.00001667583,0.0001434736],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007347789,"threshold_uncertainty_score":0.2795356,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01011747723191241,"score_gpt":0.1859974844169298,"score_spread":0.1758800071850174,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}