{"id":"W1963722959","doi":"10.1016/j.apsusc.2007.11.053","title":"Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography","year":2007,"lang":"en","type":"article","venue":"Applied Surface Science","topic":"Surface Modification and Superhydrophobicity","field":"Materials Science","cited_by":19,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université du Québec à Chicoutimi","funders":"","keywords":"Nanosphere lithography; Nanoring; Plasma-enhanced chemical vapor deposition; Materials science; Hydrocarbon; Nanodot; Chemical vapor deposition; Nanotechnology; Lithography; Nanoparticle; Fabrication; Polystyrene; Chemical engineering; Optoelectronics; Polymer; Chemistry; Composite material; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002516768,0.0002472336,0.0004021184,0.0002399196,0.0003110491,0.0004045106,0.0003870259,0.0004067766,0.001253249],"category_scores_gemma":[0.0003051182,0.0004250767,0.0002214962,0.0002245921,0.0002429881,0.0003755566,0.0002970466,0.000324637,0.0006001756],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005486829,"about_ca_system_score_gemma":0.0002897802,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008335274,"about_ca_topic_score_gemma":0.002248493,"domain_scores_codex":[0.9997781,0.00001312399,0.00002061744,0.00006576806,0.00007168001,0.00005073837],"domain_scores_gemma":[0.9997837,0.00005882975,0.00004255897,0.00005495661,0.00003428206,0.00002565595],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002903879,0.00001340299,0.00004939006,0.00002752011,0.000002929541,0.00003092013,0.00002391629,0.0001771517,0.9975832,0.0001705819,0.00007649499,0.001815449],"study_design_scores_gemma":[0.000005813245,0.00002169836,0.0003141875,9.002146e-7,0.000001651478,0.00002767104,0.000006266787,0.00122523,0.9976918,0.0000339327,0.0006664058,0.000004480046],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9478385,0.0008326684,0.04271946,0.0002339046,0.00009306621,0.0001422103,0.0006990835,0.001013914,0.00642712],"genre_scores_gemma":[0.9129264,0.0004745243,0.08029041,0.00009098338,0.00001983175,0.0001365796,0.0005688588,0.0001197054,0.005372655],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001253249,"threshold_uncertainty_score":0.004192531,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01992364323395225,"score_gpt":0.2472496230176217,"score_spread":0.2273259797836695,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}