{"id":"W1963939078","doi":"10.1117/12.661119","title":"Metrology (including materials characterization) for nanoelectronics","year":2006,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Semtech (Canada)","funders":"Association of Medical Research Charities","keywords":"Nanoelectronics; Metrology; Transistor; CMOS; Characterization (materials science); Electronics; Nanotechnology; Pace; Integrated circuit; Electrical engineering; Electronic circuit; Engineering physics; Engineering; Computer science; Materials science; Physics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002759141,0.001302299,0.001528411,0.003278119,0.001269729,0.002802239,0.001975499,0.002581218,0.01290722],"category_scores_gemma":[0.004744553,0.0005997971,0.000720542,0.002653057,0.002834827,0.003900965,0.00287583,0.003316605,0.01486042],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001619791,"about_ca_system_score_gemma":0.001751311,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009164385,"about_ca_topic_score_gemma":0.0009200133,"domain_scores_codex":[0.9963217,0.000664482,0.0001791114,0.0005742449,0.002088621,0.0001719364],"domain_scores_gemma":[0.9969465,0.000570006,0.000294075,0.0008592268,0.001168107,0.0001620791],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.000111386,0.0001094544,0.000966822,0.002291485,0.00007489321,0.0002835455,0.0003533308,0.00198378,0.04660358,0.2376426,0.1240176,0.5855615],"study_design_scores_gemma":[0.00001354841,0.00009957342,0.0008880539,0.0003603698,0.0000205562,0.0007882464,0.00008932321,0.003475009,0.01634226,0.08384492,0.8940129,0.00006517598],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.006109341,0.1675362,0.6586311,0.02260612,0.01269995,0.0004755385,0.001669702,0.005802113,0.12447],"genre_scores_gemma":[0.1334516,0.09966318,0.6537259,0.007521382,0.009609435,0.0007226447,0.002522537,0.0013854,0.09139805],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.01290722,"threshold_uncertainty_score":0.04317904,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01154385034502815,"score_gpt":0.2207134403162259,"score_spread":0.2091695899711977,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}