{"id":"W1964669704","doi":"10.1116/1.4751550","title":"Porous TEM windows fabrication using CsCl self-assembly","year":2012,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Anodic Oxide Films and Nanostructures","field":"Materials Science","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Membrane; Porous silicon; Silicon nitride; Porosity; Fabrication; Transmission electron microscopy; Etching (microfabrication); Scanning electron microscope; Nanotechnology; Silicon; Chemical engineering; Nitride; Composite material; Optoelectronics; Layer (electronics); Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002283083,0.0003355636,0.0001954619,0.0002878378,0.0002233812,0.0003152619,0.0003087872,0.0003811395,0.000736109],"category_scores_gemma":[0.0003938757,0.0003398018,0.0002926758,0.0001529415,0.0002304456,0.0003346813,0.0004043365,0.0004965895,0.0003650899],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003185609,"about_ca_system_score_gemma":0.0002723877,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005995458,"about_ca_topic_score_gemma":0.001221126,"domain_scores_codex":[0.9998221,0.0000126667,0.00001931725,0.00004230784,0.00007353981,0.00003012667],"domain_scores_gemma":[0.9996688,0.00007966504,0.00009656585,0.00006084648,0.0000609093,0.00003322083],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001052215,0.000008180718,0.00003927756,0.00003276822,0.000004186938,0.00003901046,0.00002277016,0.00007448107,0.9980186,0.0001744929,0.0000621991,0.001513554],"study_design_scores_gemma":[0.00000285145,0.00002073136,0.0001716905,0.000001752337,0.000002866016,0.00006209673,0.000004768899,0.0004263935,0.9982412,0.00001678153,0.001045491,0.000003292111],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9256788,0.001066549,0.06644841,0.000188183,0.0001082114,0.0001882447,0.0005005369,0.001006477,0.004814528],"genre_scores_gemma":[0.928277,0.0009934417,0.06526804,0.00008291188,0.00002260291,0.0001615464,0.0005319392,0.0001088726,0.004553766],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000736109,"threshold_uncertainty_score":0.002462566,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01431642526775772,"score_gpt":0.238914435841275,"score_spread":0.2245980105735172,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}