{"id":"W1965446972","doi":"10.4028/www.scientific.net/ssp.145-146.381","title":"Damage-Free Post-CMP Cleaning Solution for Low-<i>k</i> Fluorocarbon on Advanced Interconnects","year":2009,"lang":"en","type":"article","venue":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Fluorocarbon; Materials science; Dielectric; Chemical-mechanical planarization; Low-k dielectric; Porosity; Optoelectronics; Process (computing); Composite material; Chemical engineering; Nanotechnology; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","scholarly_communication"],"consensus_categories":["metaepi_narrow"],"category_scores_codex":[0.001887439,0.002085302,0.002322045,0.0008350032,0.001021426,0.001188959,0.003378656,0.0002824707,0.0001583493],"category_scores_gemma":[0.0004703923,0.002044456,0.0002888802,0.0007098232,0.0003264406,0.00344361,0.002453751,0.0007773611,0.0002152892],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000442933,"about_ca_system_score_gemma":0.0001910158,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005630067,"about_ca_topic_score_gemma":0.0005090917,"domain_scores_codex":[0.989502,0.0004053163,0.002572753,0.003225229,0.001133292,0.003161467],"domain_scores_gemma":[0.9911293,0.0006475234,0.000797654,0.005749451,0.0004194051,0.001256673],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.004117817,0.001403938,0.00004485824,0.001789725,0.001156322,0.0001507266,0.009076862,0.0181374,0.8592405,0.0006627914,0.03495639,0.0692627],"study_design_scores_gemma":[0.03121895,0.007799479,0.002990046,0.00273925,0.001170981,0.0001250878,0.002298891,0.5434778,0.03922484,0.01907562,0.3377062,0.01217281],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9183393,0.003395339,0.005974622,0.0002933353,0.003339498,0.003185601,0.06191457,0.001672027,0.001885682],"genre_scores_gemma":[0.9356387,0.01103615,0.001911458,0.001575113,0.001287527,0.0002435445,0.04722416,0.0006211269,0.0004622206],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.8200156,"threshold_uncertainty_score":0.9998479,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02248232468951942,"score_gpt":0.2674342448658285,"score_spread":0.2449519201763091,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}