{"id":"W1965634225","doi":"10.3390/s150407349","title":"A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process","year":2015,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"CMC Microsystems (Canada); Queen's University; McGill University","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Microelectromechanical systems; Accelerometer; Microfabrication; Bulk micromachining; Materials science; Wafer; Capacitive sensing; Surface micromachining; Gyroscope; Optoelectronics; Electronic engineering; Capacitance; Fabrication; Electrical engineering; Engineering; Computer science; Electrode","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008991078,0.0002189179,0.0002704985,0.0002320921,0.00003115517,0.00002258077,0.000205473,0.0002096463,0.00001397838],"category_scores_gemma":[0.00005964104,0.0002034351,0.00003031902,0.0005307847,0.00007569041,0.0002381538,0.00002909977,0.0003348438,0.00003214635],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001173683,"about_ca_system_score_gemma":0.00001878261,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000808531,"about_ca_topic_score_gemma":0.0001228995,"domain_scores_codex":[0.9989686,0.00001145449,0.0002336833,0.0002395037,0.0001562282,0.0003905174],"domain_scores_gemma":[0.9994866,0.00002348667,0.00003173206,0.0002512361,0.0000980179,0.0001089589],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002777241,0.0003789607,0.002297571,0.0001360494,0.0001743004,0.0002580658,0.02150277,0.1249049,0.82094,0.0003028216,0.00110282,0.02772403],"study_design_scores_gemma":[0.003240496,0.0003099844,0.04005847,0.00009879001,0.00003218695,0.00002874107,0.007524939,0.03207217,0.9086651,0.005470916,0.001116372,0.001381817],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9975294,0.00004183805,0.0001732417,0.00006275905,0.0001743517,0.0002290314,0.00002648005,0.0008332263,0.0009296775],"genre_scores_gemma":[0.9991747,0.0000149025,0.0005623222,0.00002838146,0.00003518394,0.00001947188,0.00002216454,0.00004694834,0.0000959492],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.09283277,"threshold_uncertainty_score":0.8295841,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.1222252417513498,"score_gpt":0.3049669636465435,"score_spread":0.1827417218951937,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}