{"id":"W1965635559","doi":"10.1109/memsys.2010.5442506","title":"From microgripping to nanogripping","year":2010,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Ontario Ministry of Research and Innovation; Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Microfabrication; Materials science; Wafer; Fabrication; Scanning electron microscope; Silicon on insulator; Focused ion beam; Silicon; Nanotechnology; Optoelectronics; Composite material; Ion","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001333306,0.0003588868,0.0002619235,0.0002780442,0.0003679954,0.0004363677,0.0006848188,0.0004180605,0.004796553],"category_scores_gemma":[0.0002512946,0.0003174013,0.0001891486,0.0001584261,0.00077484,0.0007367742,0.0009358953,0.00061084,0.002530179],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002385624,"about_ca_system_score_gemma":0.0001570314,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002542754,"about_ca_topic_score_gemma":0.0004952382,"domain_scores_codex":[0.9998261,0.00001202707,0.000008030667,0.0000708238,0.00006057453,0.00002250399],"domain_scores_gemma":[0.9998457,0.0000442256,0.00001490626,0.00005897418,0.00001909954,0.00001706311],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000853813,0.00003694273,0.0003212358,0.0003081053,0.00001496902,0.0003250649,0.0002505555,0.001481007,0.7678623,0.01578209,0.00539614,0.2081362],"study_design_scores_gemma":[0.00002373741,0.0003435657,0.002108237,0.00006574223,0.0000200281,0.001319924,0.0001581224,0.007727829,0.8376785,0.01300548,0.1374598,0.00008899428],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2880969,0.02166905,0.5650159,0.002596668,0.001933147,0.0002579346,0.000589785,0.008064301,0.1117763],"genre_scores_gemma":[0.641815,0.01391642,0.2888191,0.001591563,0.0005664056,0.0001528471,0.0005147691,0.0008678871,0.05175605],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004796553,"threshold_uncertainty_score":0.01604611,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003952644774058293,"score_gpt":0.2026732353569863,"score_spread":0.198720590582928,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}