{"id":"W1967077032","doi":"10.1016/j.micron.2013.11.002","title":"In situ TEM study of stability of TaRhx diffusion barriers using a novel sample preparation method","year":2013,"lang":"en","type":"article","venue":"Micron","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; University of Alberta","keywords":"Materials science; Diffusion barrier; Nucleation; Transmission electron microscopy; Diffusion; Focused ion beam; Atomic diffusion; Analytical Chemistry (journal); Grain size; Surface diffusion; Void (composites); Layer (electronics); Composite material; Crystallography; Nanotechnology; Ion; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001735225,0.0001857804,0.0001602146,0.000106193,0.000199488,0.0002191794,0.0002898462,0.0002515317,0.001259804],"category_scores_gemma":[0.0001872987,0.000202179,0.00008447946,0.0001130965,0.0001810538,0.0002705849,0.0001339066,0.0002797927,0.0001714378],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001566659,"about_ca_system_score_gemma":0.00009995815,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004107518,"about_ca_topic_score_gemma":0.0008001229,"domain_scores_codex":[0.9999199,0.000008071102,0.000005210155,0.00002963813,0.00002398142,0.00001318703],"domain_scores_gemma":[0.9998524,0.00002989678,0.00004410749,0.00002182149,0.00004251589,0.000009192741],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003249961,0.000006615673,0.00009954121,0.00002129877,0.000002267085,0.0000182681,0.00002720664,0.00003371187,0.9992987,0.00003940201,0.0000172652,0.0004032023],"study_design_scores_gemma":[0.000006159155,0.00008443762,0.001938358,0.000001948464,0.000007392467,0.00006513438,0.00003231651,0.0008373868,0.996473,0.00001106788,0.0005389242,0.0000037625],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9956009,0.0002613971,0.003432516,0.00004036833,0.00001588284,0.000008532371,0.00008920133,0.00003617176,0.0005149206],"genre_scores_gemma":[0.9940121,0.0002057326,0.00434424,0.00001373842,0.000007768376,0.00001524089,0.00009773905,0.00002179244,0.0012816],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001259804,"threshold_uncertainty_score":0.004214466,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03051468557647083,"score_gpt":0.318507289268438,"score_spread":0.2879926036919672,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}