{"id":"W1968009784","doi":"10.3390/molecules170910119","title":"Dry Etching of Copper Phthalocyanine Thin Films: Effects on Morphology and Surface Stoichiometry","year":2012,"lang":"en","type":"article","venue":"Molecules","topic":"Copper-based nanomaterials and applications","field":"Materials Science","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; Alberta Innovates; Alberta Innovates - Technology Futures","keywords":"Nanopillar; X-ray photoelectron spectroscopy; Materials science; Copper; Stoichiometry; Phthalocyanine; Thin film; Etching (microfabrication); Analytical Chemistry (journal); Argon; Copper phthalocyanine; Plasma etching; Chemical engineering; Nanotechnology; Chemistry; Nanostructure; Optoelectronics; Metallurgy; Physical chemistry; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003129755,0.0001342066,0.0002231485,0.00006382312,0.00009213948,0.00002558846,0.0001321073,0.00007092197,0.0002115567],"category_scores_gemma":[0.00006107441,0.0001124141,0.00003076309,0.0001266533,0.00008395865,0.00006899791,0.00008965804,0.00005561271,0.00009306279],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001195903,"about_ca_system_score_gemma":0.00001447753,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009339711,"about_ca_topic_score_gemma":0.000001747502,"domain_scores_codex":[0.9991039,0.0001081396,0.0001883531,0.0002067973,0.0001335035,0.0002593307],"domain_scores_gemma":[0.9993334,0.000206568,0.00009782235,0.0002554596,0.00002096939,0.00008573468],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002404253,0.00009015227,0.002689471,0.00005110193,0.000004670002,0.000002498326,0.0001713541,0.00008591651,0.9946595,0.001581072,0.0003120816,0.0003280884],"study_design_scores_gemma":[0.0002855273,0.0001315456,0.01343011,0.00004060533,0.00001506826,0.000006627737,0.00005087284,0.00004721325,0.9855568,0.00008150178,0.0002315145,0.0001226005],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9979599,0.0005831001,0.0002722193,0.000121151,0.0002380597,0.0001767121,0.00005314359,0.00004820967,0.0005474713],"genre_scores_gemma":[0.9948148,0.00001498027,0.004815093,0.0002183496,0.00004447919,0.00001547179,0.00001089558,0.00001791553,0.00004800857],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01074064,"threshold_uncertainty_score":0.4584115,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01129176734522517,"score_gpt":0.2564149098631723,"score_spread":0.2451231425179471,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}