{"id":"W1969311468","doi":"10.1063/1.2113415","title":"X-ray photoelectron spectroscopy and structural analysis of amorphous SiOxNy films deposited at low temperatures","year":2005,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal; Regroupement Québécois sur les Matériaux de Pointe","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"X-ray photoelectron spectroscopy; Dangling bond; Silicon oxynitride; Analytical Chemistry (journal); Amorphous solid; Silicon; Materials science; Chemical vapor deposition; Chemistry; Crystallography; Silicon nitride; Nuclear magnetic resonance; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005744175,0.0002197211,0.0001191414,0.0001853703,0.0001541479,0.0001733971,0.0001821174,0.0001647144,0.0009515524],"category_scores_gemma":[0.0001038781,0.0001098989,0.0001052864,0.0001705448,0.0001452545,0.0001268109,0.00009487427,0.0001672684,0.0001110509],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001687303,"about_ca_system_score_gemma":0.00007559394,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009318161,"about_ca_topic_score_gemma":0.0009564119,"domain_scores_codex":[0.9999528,0.000003172652,0.000003114589,0.00001367135,0.00001724033,0.000009994953],"domain_scores_gemma":[0.9999521,0.00001147818,0.00001398891,0.000006440834,0.00001004585,0.000006026715],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002943089,0.000005359963,0.00054377,0.00002102825,0.000002710532,0.0000268346,0.00002233365,0.0001470791,0.9988194,0.00002982752,0.000008128698,0.0003440534],"study_design_scores_gemma":[0.000007952016,0.0002399574,0.02809647,0.000008048315,0.00001535703,0.0001144865,0.00009198905,0.00327768,0.9674541,0.0000474797,0.0006418161,0.000004565475],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9990327,0.0001060809,0.0004126031,0.000005718037,0.0000015042,0.000003396388,0.0001102105,0.000009922553,0.0003177784],"genre_scores_gemma":[0.9980937,0.0001537336,0.0009505156,0.000005187073,0.000001903554,0.000008702351,0.000218038,0.000007151808,0.0005611723],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009515524,"threshold_uncertainty_score":0.003183305,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003287875458395105,"score_gpt":0.1931109525589463,"score_spread":0.1898230771005512,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}