{"id":"W1969315529","doi":"10.1063/1.1468268","title":"Determining the profile of textured membranes by the alpha particle energy loss method","year":2002,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Undercut; Materials science; Silicon; Membrane; Grating; Silicon dioxide; Particle (ecology); Spectroscopy; Optics; Analytical Chemistry (journal); Chemistry; Composite material; Optoelectronics; Physics; Chromatography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001656754,0.0002115487,0.0001598785,0.0004670417,0.0001893,0.0005406477,0.0002505064,0.0002671523,0.0009371097],"category_scores_gemma":[0.0005590799,0.0001940094,0.0001287793,0.0002674458,0.0002302453,0.0003889663,0.000208269,0.0004151754,0.000415766],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004016542,"about_ca_system_score_gemma":0.00015863,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006597407,"about_ca_topic_score_gemma":0.0006146544,"domain_scores_codex":[0.9998247,0.00001439681,0.000007053275,0.00003253821,0.00009270263,0.00002866198],"domain_scores_gemma":[0.9997337,0.00006502983,0.00005931116,0.00003559619,0.00008421917,0.00002205884],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005682692,0.000007515263,0.0007706414,0.00001497196,0.000002705209,0.0000314483,0.00002589789,0.0001763492,0.9956987,0.0001585401,0.00002755605,0.003028767],"study_design_scores_gemma":[0.000006072547,0.00005640973,0.005152429,0.000003675494,0.000004719617,0.0001137963,0.00004009551,0.004848182,0.9888848,0.00007296439,0.0008106904,0.000006094],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9647473,0.0003812182,0.03231477,0.0000486678,0.00001330818,0.00002695754,0.0002233215,0.0002123366,0.002032044],"genre_scores_gemma":[0.9800667,0.0004173069,0.01765727,0.00003798983,0.000004757906,0.00002813905,0.0001955524,0.00004203143,0.001550256],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009371097,"threshold_uncertainty_score":0.003134906,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01046415423071641,"score_gpt":0.2067897630664172,"score_spread":0.1963256088357008,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}