{"id":"W1970103693","doi":"10.1063/1.1413234","title":"Blistering of silicon crystals by low keV hydrogen and helium ions","year":2001,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Exfoliation joint; Ion implantation; Materials science; Analytical Chemistry (journal); Helium; Hydrogen; Ion; Wafer; Silicon; Crystallography; Nanotechnology; Chemistry; Metallurgy; Graphene","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001762226,0.0003330961,0.0002660324,0.0001701305,0.0001389244,0.0003171119,0.0002126664,0.0002939182,0.0009187423],"category_scores_gemma":[0.0002847741,0.0002017703,0.0002593533,0.0001905232,0.000239792,0.0001814418,0.0002476833,0.000316576,0.0001539638],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002810385,"about_ca_system_score_gemma":0.0001117777,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004520506,"about_ca_topic_score_gemma":0.000526597,"domain_scores_codex":[0.999785,0.00002579923,0.00001368909,0.00004803314,0.00006875439,0.00005864481],"domain_scores_gemma":[0.9997362,0.00009315037,0.00007807939,0.00002884913,0.00003471887,0.00002904446],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008447646,0.000007151051,0.0004176856,0.00002773062,0.000008009072,0.00006358993,0.00002852436,0.0001096435,0.998706,0.00002155634,0.00001511776,0.0005105482],"study_design_scores_gemma":[0.000006312438,0.0001508856,0.003184213,0.000002081836,0.000005543245,0.00007559767,0.00002657431,0.0004240734,0.9958209,0.000009703559,0.000291207,0.000002935313],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.998746,0.0002768474,0.000432844,0.000008861583,0.000007265729,0.000006770402,0.00006826793,0.00001591777,0.0004371874],"genre_scores_gemma":[0.9981825,0.0001540295,0.0006662178,0.00001705313,0.000004063154,0.000006827866,0.00008629391,0.00001367417,0.0008693064],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009187423,"threshold_uncertainty_score":0.003073514,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009045159830392497,"score_gpt":0.201815186700999,"score_spread":0.1927700268706065,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}