{"id":"W1970156869","doi":"10.1116/1.1428277","title":"Inductively coupled plasma etching of InP using CH4/H2 and CH4/H2/N2","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Etching (microfabrication); X-ray photoelectron spectroscopy; Inductively coupled plasma; Analytical Chemistry (journal); Plasma; Surface roughness; Chemistry; Hydrogen; Reactive-ion etching; Materials science; Layer (electronics); Nanotechnology; Chemical engineering; Composite material; Environmental chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007753692,0.0002620221,0.0004781912,0.0009626991,0.0003035942,0.0001974423,0.0003036522,0.0001355381,0.000008033889],"category_scores_gemma":[0.0000398803,0.0002076261,0.00003312868,0.0007416391,0.0005138082,0.000580186,0.00009176759,0.0003563856,4.75483e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001380544,"about_ca_system_score_gemma":0.0001061724,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002671896,"about_ca_topic_score_gemma":0.000001920034,"domain_scores_codex":[0.9983242,0.00001706187,0.0005359675,0.0002801469,0.00038031,0.000462323],"domain_scores_gemma":[0.999074,0.00001387365,0.0003975258,0.0001237763,0.0002881966,0.0001025637],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001797992,0.00001572619,0.0007057376,0.0001410989,0.00005330397,0.000001523033,0.0007341368,0.00004037337,0.9856809,0.000148426,0.000002928903,0.01245788],"study_design_scores_gemma":[0.002357327,0.001048861,0.002676378,0.000535062,0.0002668577,0.001032977,0.001020573,0.01978611,0.9577093,0.01200966,0.0006991292,0.0008577388],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.95997,0.03929387,0.0003027369,0.00007333289,0.0001967907,0.0001025322,0.000002514991,0.00003041843,0.00002781814],"genre_scores_gemma":[0.9961049,0.001379608,0.002408818,0.00001879986,0.00006404227,0.000001437677,3.723786e-7,0.00002045197,0.000001589479],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03791426,"threshold_uncertainty_score":0.8466748,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02580608757318272,"score_gpt":0.2176258819395207,"score_spread":0.1918197943663379,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}