{"id":"W1970769783","doi":"10.1116/1.1285991","title":"Analysis of silicon–oxide–silicon nitride stacks by medium-energy ion scattering","year":2000,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University; Institute for Microstructural Sciences","funders":"","keywords":"Silicon nitride; Nitride; Oxide; Silicon oxide; Materials science; Nitrogen; Silicon; Analytical Chemistry (journal); Chemical vapor deposition; Ion; Scattering; Deposition (geology); Inorganic chemistry; Chemistry; Layer (electronics); Optoelectronics; Nanotechnology; Optics; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001607526,0.0003180754,0.0002153696,0.0003497634,0.0002854915,0.0002705545,0.0001729823,0.000141644,0.0004726215],"category_scores_gemma":[0.0001882298,0.0001232483,0.000194383,0.0002273976,0.0001529483,0.0001897927,0.0002151253,0.0001938759,0.00009730869],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002524463,"about_ca_system_score_gemma":0.0001268115,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001080147,"about_ca_topic_score_gemma":0.001464001,"domain_scores_codex":[0.9999018,0.000007515163,0.000003926491,0.00001655727,0.000054248,0.00001593063],"domain_scores_gemma":[0.9999037,0.00002834365,0.00001755058,0.00000705322,0.00003373299,0.000009678498],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005585487,0.00000569359,0.000688352,0.00002074436,0.000008821803,0.00002947272,0.00002215685,0.0003103393,0.9975677,0.00007756271,0.00001529888,0.00119795],"study_design_scores_gemma":[0.000007971079,0.0001246104,0.01148643,0.000005522295,0.00001814082,0.0001510401,0.00008870736,0.006007907,0.980679,0.0001098581,0.001310292,0.00001057844],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9900998,0.0006188123,0.007380735,0.00001616339,0.00001073916,0.00001965891,0.0001680653,0.00004131886,0.001644762],"genre_scores_gemma":[0.9873155,0.0006362941,0.01063108,0.00002182551,0.0000110095,0.00002685541,0.0004448333,0.00002888213,0.0008836761],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001080147,"threshold_uncertainty_score":0.002147734,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005950065598317162,"score_gpt":0.2181965025665424,"score_spread":0.2122464369682253,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}