{"id":"W1970959119","doi":"10.1016/j.mee.2006.10.020","title":"Tuning nickel silicide properties using a lamp based RTA, a heat conduction based RTA or a furnace anneal","year":2006,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Semiconductor materials and interfaces","field":"Physics and Astronomy","cited_by":11,"is_retracted":false,"has_abstract":false,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Materials science; Wafer; Sheet resistance; Silicide; Nickel; Metallurgy; Yield (engineering); Optoelectronics; Alloy; Thermal conduction; Analytical Chemistry (journal); Silicon; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002907973,0.0003802951,0.0004773353,0.0002661582,0.0004187941,0.0005618208,0.0003789459,0.0003481053,0.002103805],"category_scores_gemma":[0.0006748787,0.0002632426,0.0002760121,0.0003055883,0.0003019964,0.0004818903,0.0002125175,0.0004316313,0.0006939417],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003467062,"about_ca_system_score_gemma":0.0003093935,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005708109,"about_ca_topic_score_gemma":0.001731699,"domain_scores_codex":[0.9998261,0.00001554754,0.00001571502,0.00004752967,0.00006238114,0.00003280938],"domain_scores_gemma":[0.9995841,0.0001192591,0.00007066782,0.0001296195,0.00006977043,0.00002653103],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001144244,0.00001667874,0.00021637,0.00005336536,0.00000971267,0.00003696451,0.00003264658,0.0001087438,0.997353,0.0000797238,0.00006729698,0.001911137],"study_design_scores_gemma":[0.000009430364,0.00009149157,0.001297751,0.000001991981,0.000009992351,0.00005758229,0.00001237551,0.0006411838,0.9970008,0.00002370988,0.0008483634,0.00000547153],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.986236,0.0005761088,0.006079695,0.0000899224,0.00004872899,0.00008187614,0.0003167243,0.0005636322,0.006007266],"genre_scores_gemma":[0.9931089,0.0002021192,0.003365987,0.00002978954,0.000008947709,0.00003671514,0.0001548362,0.0001956746,0.002896899],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002103805,"threshold_uncertainty_score":0.007037938,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01662973607653924,"score_gpt":0.2154034094054867,"score_spread":0.1987736733289474,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}