{"id":"W1971229787","doi":"10.1016/j.proeng.2014.11.263","title":"Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications","year":2014,"lang":"en","type":"article","venue":"Procedia Engineering","topic":"Ultrasonics and Acoustic Wave Propagation","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs; Manitoba Hydro; CMC Microsystems","keywords":"Capacitive micromachined ultrasonic transducers; Transducer; Ultrasonic sensor; Capacitive sensing; Acoustics; Stack (abstract data type); SIGNAL (programming language); Materials science; Vibration; Engineering; Electrical engineering; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003028559,0.0002449276,0.0002476632,0.0001591983,0.0001121488,0.0000176305,0.0001165112,0.0001019066,0.000005197034],"category_scores_gemma":[0.0001271414,0.0002727742,0.00006755885,0.0002215518,0.00001359958,0.0001234186,0.000007532077,0.0001587013,0.00000332298],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002047259,"about_ca_system_score_gemma":0.0000322984,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001194149,"about_ca_topic_score_gemma":0.00003959323,"domain_scores_codex":[0.9987364,0.000006368084,0.0004715596,0.0002607326,0.0001738833,0.0003510364],"domain_scores_gemma":[0.9994115,0.0001641472,0.00008043541,0.0001482474,0.0001167104,0.00007893361],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001133835,0.00002381821,0.00001127145,0.0005883378,0.00005270445,3.324372e-8,0.0005706839,0.1931967,0.7999197,0.000162525,0.000001269561,0.005461575],"study_design_scores_gemma":[0.000488514,0.00002143766,0.0003417195,0.00005393797,0.00003227467,0.000001804857,0.00004196164,0.4796372,0.5187529,0.00003982796,0.0003980576,0.0001904042],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2805682,0.00007257162,0.7182267,0.000009866678,0.0001394194,0.0006876758,0.00002221261,0.0002478526,0.00002548998],"genre_scores_gemma":[0.8649994,0.00001686642,0.1337521,0.000004975685,0.0001444352,0.0009280778,0.00008496295,0.00006393074,0.000005297165],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.5844746,"threshold_uncertainty_score":0.9999725,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005081673358849488,"score_gpt":0.1791156289133665,"score_spread":0.174033955554517,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}