{"id":"W1971482675","doi":"10.1364/ol.31.002517","title":"Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation","year":2006,"lang":"en","type":"article","venue":"Optics Letters","topic":"Laser-Plasma Interactions and Diagnostics","field":"Physics and Astronomy","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Extreme ultraviolet lithography; Extreme ultraviolet; Optics; Laser; Materials science; Fiber laser; Plasma; Energy conversion efficiency; Soft X-rays; Optical fiber; Optoelectronics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006364889,0.0001176678,0.0001088205,0.00007158956,0.00008706566,0.00005993317,0.00005602115,0.00002837682,0.00005342297],"category_scores_gemma":[0.000006680816,0.0001198192,0.00003650356,0.0001207646,0.00002373398,0.00006504861,0.00002287959,0.00006496966,0.00009084039],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002223185,"about_ca_system_score_gemma":0.00001314548,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001921413,"about_ca_topic_score_gemma":0.00001630994,"domain_scores_codex":[0.9992391,0.00001626385,0.0002481279,0.0002301833,0.0001268611,0.000139404],"domain_scores_gemma":[0.9995124,0.00005758347,0.0001149325,0.0001914359,0.00007290688,0.00005077417],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001321072,0.0002004116,0.003261892,0.00001216742,0.00001987859,4.896365e-7,0.00009231802,0.4310909,0.5494134,0.003748009,0.006617539,0.005529718],"study_design_scores_gemma":[0.0005190287,0.00006380519,0.00154286,0.00002719692,0.00006884826,0.000002319201,0.00007704843,0.1663444,0.8220192,0.00005890583,0.008987949,0.0002884442],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8767483,0.000001361354,0.1187587,0.0015935,0.0001039204,0.0002284952,0.0000188621,0.00001592278,0.002531001],"genre_scores_gemma":[0.9929633,3.737961e-7,0.005996321,0.00008615961,0.0003761003,0.00004027906,0.000114396,0.00001425551,0.0004087749],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2726058,"threshold_uncertainty_score":0.4886084,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008215109101488167,"score_gpt":0.2101450405498919,"score_spread":0.2019299314484037,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}